Synergetic effect of 1,2,4-triazole and glycine on chemical mechanical planarization of aluminum at low polishing pressure in an eco-friendly slurry

Sun, Ping1; Wang, Yongguang1; Liu, Ping2; Zhu, Yuguang1; Zhao, Yongwu2; Zhao, Dong1; Deng, Hui3

2020

10.1149/2162-8777/ab7882/pdf

ECS Journal of Solid State Science and Technology   影响因子和分区

21628777

2162-8777

In this paper, glycine and 1,2,4-triazole (TAZ) are used as eco-friendly additives to compensate the decrease in removal rate owing to the low polishing pressure in chemical mechanical planarization (CMP) of aluminum (Al) at near-neutral pH value. It demonstrated that the synergetic effect of glycine and TAZ participates in the formation of a weak passive layer with the hardness of 0.419 GPa on Al surface, which is compact enough to protect the Al surface from chemical dissolution and meanwhile relatively weak enough to achieve high polishing rate. Even at a low polishing pressure of 1.0 psi, a material removal rate of 750 nm min^–1 with surface roughness of 0.19 nm was obtained in an eco-friendly slurry at pH 7.5. It was found that the weak passive layer is physicochemical formed on surface of Al with Al-TAZ bonds, which is subsequently complexed by glycine with Al-COOH bonds verified by Langmuir isotherm theory and X-ray photoelectron spectroscopy test. The above two synergistic parts are integrated into the material removal process. The material planarization mechanism in CMP process of Al was discussed as well.
© 2020 The Electrochemical Society ("ECS").

SCI ; EI

英语

其他

China Postdoctoral Science Foundation[2015M571800] ; National Natural Science Foundation of China[51775360] ; Jiangsu Province Postdoctoral Science Foundation[1402121C]

Materials Science ; Physics

Materials Science, Multidisciplinary ; Physics, Applied

WOS:000518537200001

Institute of Physics Publishing

20201208320019

Additives ; Aluminum ; Aluminum compounds ; Amino acids ; Environmental protection ; Isotherms ; Polishing ; Surface roughness ; X ray photoelectron spectroscopy

Environmental Impact and Protection:454.2 ; Aluminum:541.1 ; Machining Operations:604.2 ; Chemical Agents and Basic Industrial Chemicals:803 ; Organic Compounds:804.1 ; Physical Properties of Gases, Liquids and Solids:931.2

Web of Science

1.School of Mechanical and Electric Engineering, Soochow University, Suzhou, Jiangsu; 215021, China
2.School of Mechanical Engineering, Jiangnan University, Wuxi; 214122, China
3.Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, Guangdong; 518055, China

Sun, Ping,Wang, Yongguang,Liu, Ping,et al. Synergetic effect of 1,2,4-triazole and glycine on chemical mechanical planarization of aluminum at low polishing pressure in an eco-friendly slurry[J]. ECS Journal of Solid State Science and Technology,2020,9(3).

Sun, Ping.,Wang, Yongguang.,Liu, Ping.,Zhu, Yuguang.,Zhao, Yongwu.,...&Deng, Hui.(2020).Synergetic effect of 1,2,4-triazole and glycine on chemical mechanical planarization of aluminum at low polishing pressure in an eco-friendly slurry.ECS Journal of Solid State Science and Technology,9(3).

Sun, Ping,et al."Synergetic effect of 1,2,4-triazole and glycine on chemical mechanical planarization of aluminum at low polishing pressure in an eco-friendly slurry".ECS Journal of Solid State Science and Technology 9.3(2020).