Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography

Fang，Xiaoguo1,2; Zheng，Changxiong1; Yin，Zhen1; Wang，Zhenming1; Wang，Jiawei1; Liu，Jianxun1; Luo，Dan1; Liu，Yan Jun1

2020-03-11

10.1021/acsami.9b22932

ACS Applied Materials & Interfaces   影响因子和分区

1944-8244

1944-8252

We developed an improved self-assembly method to obtain a large-area, high-quality templated monolayer mask using the polystyrene spheres. On the basis of the templated mask, hierarchically ordered Si metastructures with different nanosteps are fabricated using cyclic inductively coupled plasma etching technique. By evaporating a thin gold capping layer on these Si metastructures, their optical properties are comparatively studied using the surface-enhanced Raman scattering spectroscopy. Our proposed technique is highly promising for fabricating a variety of periodic three-dimensional hierarchically ordered metastructures, which could be further utilized for applications in SERS-based biosensors, optical absorbers, metamaterial/metasurface devices, etc.

3D lithography hierarchical metastructure nanosphere lithography plasmonic enhancement self-assembly

SCI ; EI

英语

第一 ; 通讯

Shenzhen Science and Technology Innovation Commission[JCYJ20170817111349280] ; Shenzhen Science and Technology Innovation Commission[JCYJ20180305180635082] ; Shenzhen Science and Technology Innovation Commission[GJHZ20180928155207206]

Science & Technology - Other Topics ; Materials Science

Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:000526609100105

AMER CHEMICAL SOC

20201308355843

Optical properties ; Inductively coupled plasma ; Raman scattering ; Lithography ; Nanospheres ; Silicon ; Surface scattering

Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Light/Optics:741.1 ; Nanotechnology:761 ; Classical Physics; Quantum Theory; Relativity:931 ; Plasma Physics:932.3 ; Solid State Physics:933 ; Materials Science:951

2-s2.0-85081944556

Scopus

1.Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen,518055,China
2.Harbin Institute of Technology,Harbin,150001,China

Fang，Xiaoguo,Zheng，Changxiong,Yin，Zhen,et al. Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography[J]. ACS Applied Materials & Interfaces,2020,12(10):12345-12352.

Fang，Xiaoguo.,Zheng，Changxiong.,Yin，Zhen.,Wang，Zhenming.,Wang，Jiawei.,...&Liu，Yan Jun.(2020).Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography.ACS Applied Materials & Interfaces,12(10),12345-12352.

Fang，Xiaoguo,et al."Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography".ACS Applied Materials & Interfaces 12.10(2020):12345-12352.