MEMS Gas Sensors - From Nanomaterials to Microelectrodes

Zhao，Changhui; Gong，Huimin; Niu，Gaoqiang; Wang，Fei

10.1109/MEMS46641.2020.9056235

2020

1084-6999

978-1-7281-3582-3

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2020-January

194-199

18-22 Jan. 2020

Vancouver, BC, Canada

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

MEMS gas sensors have attracted increasing attention owing to their compact size, high sensitivity and compatible fabrication process. This article briefly summarizes our recent works on the development of MEMS gas sensors based on metal-oxide semiconductor (MOS) nanomaterials for the detection of ethanol, acetone, NO, HS, etc. A few methods for fabrication of nanomaterials are introduced, focusing on the strategies for improvement in the sensitivity, selectivity, and stability. We also describe the fabrication of the micro-hotplate, as well as on-chip growth of sensitive materials on the microelectrodes, to optimize the performance and compatibility of the MEMS gas sensors.

fabrication gas sensors MEMS Metal-oxide semiconductors microelectrodes nanomaterials

第一 ; 通讯

英语

CPCI-S ; EI

Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000569381600050

20201608459508

Chemical sensors ; MEMS ; Oxide semiconductors ; Dielectric devices ; Acetone ; Microelectrodes ; MOS devices ; Nanostructured materials ; Metals ; Gas detectors ; Metallic compounds

Electric Equipment:704.2 ; Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; Chemistry:801 ; Organic Compounds:804.1 ; Accidents and Accident Prevention:914.1 ; Crystalline Solids:933.1 ; Special Purpose Instruments:943.3

2-s2.0-85083206401

Scopus

School of Microelectronics,Southern University of Science and Technology,Shenzhen,China

Zhao，Changhui,Gong，Huimin,Niu，Gaoqiang,et al. MEMS Gas Sensors - From Nanomaterials to Microelectrodes[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2020:194-199.