H2S Sensor Based on MEMS Hotplate and on-Chip Growth of CuO-SnO2 Nanosheets for High Response, Fast Recovery and Low Power Consumption

Niu，Gaoqiang; Gong，Huiming; Zhao，Changhui; Wang，Fei

10.1109/MEMS46641.2020.9056397

2020

1084-6999

978-1-7281-3582-3

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2020-January

799-802

18-22 Jan. 2020

Vancouver, BC, Canada

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This paper reports a new pulse heating strategy for HS sensor to fasten the recovery process at low power consumption. An in-plane micro-hotplate was designed and fabricated with MEMS technology, and the sensing materials of CuO-SnO nanosheets were directly deposited with on-chip growth process, which shows excellent compatibility. Using the pulse heating strategy with micro hotplate, we have taken both the advantages of high sensitivity at room temperature and fast recovery at high temperature.

gas sensor H2S MEMS micro-hotplate pulse heating

第一 ; 通讯

英语

CPCI-S ; EI

Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330][KQTD2015071710313656]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000569381600206

20201608459315

Copper oxides ; MEMS ; Electric power utilization ; Recovery

Electric Equipment:704.2 ; Electric Power Systems:706.1 ; Nanotechnology:761 ; Inorganic Compounds:804.2 ; Solid State Physics:933

2-s2.0-85083177625

Scopus

School of Microelectronics,Southern University of Science and Technology,Shenzhen,China

Niu，Gaoqiang,Gong，Huiming,Zhao，Changhui,et al. H2S Sensor Based on MEMS Hotplate and on-Chip Growth of CuO-SnO2 Nanosheets for High Response, Fast Recovery and Low Power Consumption[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2020:799-802.