Structural transformations and desirable electronic properties of low-temperature grown ruthenium oxide films under nitrogen atmosphere

Huang，Chuanwei1; Qiu，Peiqi1; Wei，Sicong1; Zeng，Xierong1; Hu，Sixia2; Lu，Yalin3; Pan，Shusheng4; Huang，Haoliang3

2020-11-01

10.1016/j.ceramint.2020.07.098

CERAMICS INTERNATIONAL   影响因子和分区

0272-8842

1873-3956

SrRuO has recently attracted intense attentions for its intriguing physical properties. However, the ultra-high growth temperature (≥1000 °C) poses a major challenge for fabricating high-quality SrRuO films. In sharp contrast to effort previously attempted in traditional oxygen atmosphere, herein, a nitrogen gas is employed to grow ruthenium oxide films during pulsed laser depositions (PLD). It is shown that the present method facilitates a successive SrRuO–SrRuO structural transformation via increasing growth temperatures from 700 °C to 900 °C. The high-quality SrRuO film grown at a relative low deposition temperature exhibits a comparable electrical resistivity, in comparison with counterparts deposited at oxygen atmosphere. Combined X-ray photoelectron and X-ray absorption measurements suggest that the nonreactive nitrogen atmosphere involved during the deposition yields a relative lower kinetic energy of laser ablated plume reaching to substrates, and effectively regulates structural and electronic properties of ruthenium oxide films. These findings may offer a new route for synthesizing other oxide functional films with high deposition-temperature.

Deposition temperature Ruddlesden-popper transition Ruthenium oxides

SCI ; EI

英语

通讯

Natural Science Foundation of SZU[827-000198] ; Guangdong Basic and Applied Basic Research Foundation[2019A1515011529] ; Anhui Initiative in Quantum Information Technologies[AHY100000]

Materials Science

Materials Science, Ceramics

WOS:000577309500003

ELSEVIER SCI LTD

20203209011325

Kinetic energy ; Oxide films ; Oxygen ; Strontium compounds ; Substrates ; Electronic properties ; Atmospheric temperature ; Growth temperature ; Nitrogen ; Kinetics ; Pulsed lasers ; Ruthenium compounds

Atmospheric Properties:443.1 ; Fluid Flow, General:631.1 ; Lasers, General:744.1 ; Laser Applications:744.9 ; Chemical Products Generally:804 ; Classical Physics; Quantum Theory; Relativity:931

MATERIALS SCIENCE

2-s2.0-85088937905

Scopus

1.Shenzhen Key Laboratory of Special Functional Materials,College of Materials Science and Engineering,Shenzhen University,Guangdong,518060,China
2.Sustech Core Research Facilities,Southern University of Science and Technology of China,Guangdong,518055,China
3.Anhui Laboratory of Advanced Photon Science and Technology,Hefei National Laboratory for Physical Sciences at the Microscale,University of Science and Technology of China,Hefei,230026,China
4.School of Physics and Electronic Engineering,Guangzhou University,Guangzhou,510006,China

Huang，Chuanwei,Qiu，Peiqi,Wei，Sicong,et al. Structural transformations and desirable electronic properties of low-temperature grown ruthenium oxide films under nitrogen atmosphere[J]. CERAMICS INTERNATIONAL,2020,46(16):26055-26060.

Huang，Chuanwei.,Qiu，Peiqi.,Wei，Sicong.,Zeng，Xierong.,Hu，Sixia.,...&Huang，Haoliang.(2020).Structural transformations and desirable electronic properties of low-temperature grown ruthenium oxide films under nitrogen atmosphere.CERAMICS INTERNATIONAL,46(16),26055-26060.

Huang，Chuanwei,et al."Structural transformations and desirable electronic properties of low-temperature grown ruthenium oxide films under nitrogen atmosphere".CERAMICS INTERNATIONAL 46.16(2020):26055-26060.