Electrochemical Etching of Tungsten for Fabrication of Sub-10-nm Tips with a Long Taper and a Large Shank

Qin，Shanli; Deng，Hui

2019-12-01

10.1007/s41871-019-00050-6

Nanomanufacturing and Metrology   影响因子和分区

2520-811X

From the perspective of maximizing the practicability of tungsten nano-tips, a sharp tip, long taper, and large shank are usually expected. However, simultaneously satisfying the requirements for tip radius, taper length, and shank diameter is theoretically impossible with the conventional drop-off tip fabrication method, which is based on lamellae electrochemical etching. In this study, a two-step etching method is proposed to fabricate a sub-10-nm tungsten tip directly from a 1-mm rod. First, a floating electrolyte-based drop-off process is carried out to fabricate a tungsten needle with a long length taper of 10 mm. Then, an inversed lamellae drop-off process is conducted to realize fine etching of the needlepoint. As a result, an ultra-sharp tungsten nano-tip with a radius of 5.5 nm and taper length of 10 mm is successfully fabricated from a 1-mm tungsten rod.

Drop-off etching Electrochemical etching Liquid metal Nano tip Tungsten tip

EI

英语

第一 ; 通讯

20212810639763

Drops ; Electrochemical etching ; Electrolytes ; Nanotips ; Tungsten

Tungsten and Alloys:543.5 ; Electric Batteries and Fuel Cells:702 ; Nanotechnology:761 ; Chemical Agents and Basic Industrial Chemicals:803 ; Chemical Products Generally:804 ; Solid State Physics:933

2-s2.0-85084523148

Scopus

Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,No. 1088, Xueyuan Road,518055,China

Qin，Shanli,Deng，Hui. Electrochemical Etching of Tungsten for Fabrication of Sub-10-nm Tips with a Long Taper and a Large Shank[J]. Nanomanufacturing and Metrology,2019,2(4):235-240.

Qin，Shanli,&Deng，Hui.(2019).Electrochemical Etching of Tungsten for Fabrication of Sub-10-nm Tips with a Long Taper and a Large Shank.Nanomanufacturing and Metrology,2(4),235-240.

Qin，Shanli,et al."Electrochemical Etching of Tungsten for Fabrication of Sub-10-nm Tips with a Long Taper and a Large Shank".Nanomanufacturing and Metrology 2.4(2019):235-240.