Liquid metal-embedded microfluidic pressure sensor for real-time monitoring

Peng，Kelu1; Cho，Sunghyun2; Yao，Junyi1; Cho，Younghak3; Kim，Hyun Soo2; Park，Jaewon1

2019

23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019

1448-1449

We present a novel liquid metal-embedded microfluidic pressure sensor for real-time monitoring of pressure change across a microfluidic channel over a long period of time with high stability. The pressure sensor we have developed is configured by embedding microfluidic channels filled with liquid metal along the main channel, all being separated by a thin high-aspect ratio PDMS membrane. The electrical resistance of the liquid metal corresponding to different pressure levels (0-800 mbar) were characterized, where the measurement results showed a linear correlation with high repeatability.

Flow pressure sensor Liquid metal Real-time monitoring

第一 ; 通讯

英语

EI

20204509456748

Fluidic devices ; Microfluidics ; Pressure sensors ; Aspect ratio ; Metals

Metallurgy:531.1 ; Hydraulic Equipment and Machinery:632.2 ; Microfluidics:632.5.1 ; Control Equipment:732.1 ; Pressure Measuring Instruments:944.3

2-s2.0-85094965224

Scopus

1.Southern University of Science and Technology,Shenzhen,China
2.Korea Institute of Machinery and Materials,Daegu,South Korea
3.Seoul National University of Science and Technology,Seoul,South Korea

Peng，Kelu,Cho，Sunghyun,Yao，Junyi,et al. Liquid metal-embedded microfluidic pressure sensor for real-time monitoring[C],2019:1448-1449.