A miniaturized dual-slider linear actuator using electrostatic adhesion and inertia drive

Song，Xian1; Wang，Hongqiang2; Zhang，Yangkun3; Liu，Wenming1; Liu，Li4; Peng，Yuxin1

2020-12-01

10.3390/act9040114

Actuators   影响因子和分区

2076-0825

2076-0825

Dual-slider positioning in a miniaturized system is crucial in many industrial applications. This paper presents a miniaturized dual-slider linear actuator by employing one piezoelectric element (PZT) and integrating the methods of electrostatic adhesion and inertia drive. Two inertia drive methods can be converted by clamping and releasing one of the sliders on a base. Two thin-film electrodes are mounted on the base for clamping and releasing the slider by electrostatic adhesion. The actuator can thus drive dual sliders independently by converting the two inertia drive methods. A prototype is developed with a compact size of 30 mm (L) × 11 mm (W) × 11 mm (H) to evaluate the basic performance of the actuator. The maximum driving speeds of the two sliders are 31.7 mm/s and 16 mm/s, respectively, while the resolution of them is 60 nm and 13 nm, respectively. Additionally, the actuator can drive both the two sliders for long motion ranges of 14 mm. With a compact size and excellent physical performance, the proposed device has the potential for multi-slider positioning in miniaturized equipment.

Dual sliders Electrostatic adhesion Inertia drive Linear actuator Piezoelectric

SCI

英语

其他

Fundamental Research Funds for the Central Universities["2018QNA224","2020XZA206"] ; Qianjiang Talent Program of Zhejiang Province[QJC1802009] ; Jiangsu Province Natural Science Foundation of China[BK20160374] ; Natural Science Foundation of Zhejiang Province[LQ19C100002] ; MOE (Ministry of Education in China) Project of Humanities and Social Sciences[19YJCZH126]

Engineering ; Instruments & Instrumentation

Engineering, Mechanical ; Instruments & Instrumentation

WOS:000601441300001

MDPI

2-s2.0-85097557585

Scopus

1.Department of Sports Science,Zhejiang University,Hangzhou,310028,China
2.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,518055,China
3.Harbin Institute of Technology Shenzhen Graduate School,Shenzhen,518000,China
4.School of Big Data & Software Engineering,Chongqing University,Chongqing,400044,China

Song，Xian,Wang，Hongqiang,Zhang，Yangkun,et al. A miniaturized dual-slider linear actuator using electrostatic adhesion and inertia drive[J]. Actuators,2020,9(4):1-17.

Song，Xian,Wang，Hongqiang,Zhang，Yangkun,Liu，Wenming,Liu，Li,&Peng，Yuxin.(2020).A miniaturized dual-slider linear actuator using electrostatic adhesion and inertia drive.Actuators,9(4),1-17.

Song，Xian,et al."A miniaturized dual-slider linear actuator using electrostatic adhesion and inertia drive".Actuators 9.4(2020):1-17.