Controlling the interactions of surface plasmon polaritons generated by two-nanoslit structures for producing diverse sub-diffraction-limited patterns

Dong，Jianjie1; Du，Lena2; Feng，Huimin3; Liu，Qian1

2021

10.1016/j.rinp.2020.103729

Results in Physics   影响因子和分区

2211-3797

2211-3797

Flexible manipulation of surface plasmon polaritons (SPPs) in a small target area is very important for building functional plasmonic nanostructures. Here, we propose a second-order interference model to describe the interaction of SPPs generated between two nanoslits of a metal film, and propose a first-order interference model to describe the interaction of SPPs generated on each side of the two nanoslits. Using these models, a functional two-nanoslit unit structure that is capable of enhancing the peak intensities of SPPs between its two slits and diminishing the total intensity of SPPs on each side of its two slits can be designed, and another functional two-nanoslit unit structure that is capable of diminishing the peak intensities of SPPs between its two slits and enhancing the total intensity of SPPs on each side of its two slits can be designed too. In addition, the proposed models predicts that it is possible to design the mask that is capable of producing a complex pattern composed of multiple desired nanopatterns by combining multiple designed functional two-nanoslit unit structures together. Moreover, we numerically demonstrated that at the illumination wavelength of 405 nm, some complex patterns with a half-pitch resolution of about 56 nm, such as a superperiodic pattern and some letter-shaped patterns, can be produced in the photoresist by the masks designed using the proposed models.

Light-matter interaction at the nanoscale Lithography Plasmonics Sub-diffraction-limited patterns

SCI

英语

其他

National Key Research and Development Program of China["2016YFA0200404","2016YFA0200403"] ; National Natural Science Foundation of China[61505038,51971070,10974037] ; CAS Strategy Pilot Program[XDA 09020300]

Materials Science ; Physics

Materials Science, Multidisciplinary ; Physics, Multidisciplinary

WOS:000614832700011

ELSEVIER

2-s2.0-85097788340

Scopus

1.Chinese Academy of Sciences (CAS) Key Laboratory of Nanosystem and Hierarchical Fabrication,CAS Center for Excellence in Nanoscience,National Center for Nanoscience and Technology,Beijing,100190,China
2.Shenzhen Institute for Quantum Science and Engineering,Southern University of Science and Technology,Shenzhen,518055,China
3.School of Astronautics,Beihang University,Beijing,100191,China

Dong，Jianjie,Du，Lena,Feng，Huimin,et al. Controlling the interactions of surface plasmon polaritons generated by two-nanoslit structures for producing diverse sub-diffraction-limited patterns[J]. Results in Physics,2021,20.

Dong，Jianjie,Du，Lena,Feng，Huimin,&Liu，Qian.(2021).Controlling the interactions of surface plasmon polaritons generated by two-nanoslit structures for producing diverse sub-diffraction-limited patterns.Results in Physics,20.

Dong，Jianjie,et al."Controlling the interactions of surface plasmon polaritons generated by two-nanoslit structures for producing diverse sub-diffraction-limited patterns".Results in Physics 20(2021).