Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

Xiao, Xiao1; Xi, Ruidong2; Li, Yangmin3; Tang, Yirui4; Ding, Bingxiao5; Ren, Hongliang6; Meng, Max. Q. -H.1

2021

10.1007/s00542-020-05163-3

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   影响因子和分区

0946-7076

1432-1858

In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

SCI ; EI

英语

第一 ; 通讯

National Key R&D program of China[2019YFB1312400] ; National Natural Science Foundation of China[51575544] ; Hong Kong RGC TRS grant[T42-409/18-R] ; Huxiang High Level Talent Project of Hunan Province[2019RS1066]

Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied

WOS:000607032500001

SPRINGER HEIDELBERG

20210309789557

Design ; Genetic algorithms ; Mechanisms ; Radial basis function networks ; Sliding mode control

Mechanisms:601.3 ; Control Systems:731.1

MATERIALS SCIENCE

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
2.Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Macau, Peoples R China
3.Hong Kong Polytech Univ, Dept Ind & Syst Engn, Hong Kong, Peoples R China
4.Univ Macau, Inst Appl Phys & Mat Engn, Macau, Peoples R China
5.Jishou Univ, Dept Mech Engn, Jishou 416000, Peoples R China
6.Natl Univ Singapore, Dept Biomed Engn, Singapore 117580, Singapore

Xiao, Xiao,Xi, Ruidong,Li, Yangmin,et al. Design and control of a novel electromagnetic actuated 3-DoFs micropositioner[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2021,27:3763-3772.

Xiao, Xiao.,Xi, Ruidong.,Li, Yangmin.,Tang, Yirui.,Ding, Bingxiao.,...&Meng, Max. Q. -H..(2021).Design and control of a novel electromagnetic actuated 3-DoFs micropositioner.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,27,3763-3772.

Xiao, Xiao,et al."Design and control of a novel electromagnetic actuated 3-DoFs micropositioner".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 27(2021):3763-3772.