Electrochemical polishing of microfluidic moulds made of tungsten using a bi-layer electrolyte

Zhou，Xingying1; Wang，Fang1,2; Zhang，Xinquan3; Deng，Hui1

2021-06-01

10.1016/j.jmatprotec.2021.117055

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY   影响因子和分区

0924-0136

Microfluidic chips made of glass are important analytical devices for applications in biomedicine, drug development and chemical analysis. For the mass production of glass-based microfluidic chips, tungsten-made microfluidic moulds are indispensable. In this paper, a dynamic electrochemical polishing (ECP) process using a bi-layer NaOH electrolyte is proposed to uniformly polish tungsten moulds. The ECP conditions are optimized to determine the best anode potential and polishing duration. The problem of pitting during ECP can be solved by an ultra-short ECP post-treatment of several seconds. During static ECP, the material removal on the mould is nonuniform, and material removal uniformity is greatly improved by dynamic ECP. After 10 cycles of dynamic ECP, a tungsten mould with a mirror surface is obtained, and the surface roughness (Sa) is drastically reduced from 205.98 nm to 4.14 nm. The results presented in this paper demonstrate that dynamic ECP is a promising approach for highly efficient and uniform polishing of tungsten moulds with microscopic features.

Bi-layer electrolyte Electrochemical polishing Microfluidic mould Surface roughness Tungsten mould

SCI ; EI

英语

第一

WOS:000618535600005

20210509839421

Analytic equipment ; Chemical analysis ; Electrolytes ; Fluidic devices ; Glass ; Glass industry ; Microfluidics ; Polishing ; Sodium hydroxide ; Surface roughness ; Tungsten ; Tungsten metallography

Tungsten and Alloys:543.5 ; Machining Operations:604.2 ; Hydraulic Equipment and Machinery:632.2 ; Microfluidics:632.5.1 ; Electric Batteries and Fuel Cells:702 ; Chemistry:801 ; Chemical Agents and Basic Industrial Chemicals:803 ; Chemical Products Generally:804 ; Glass:812.3 ; Physical Properties of Gases, Liquids and Solids:931.2

MATERIALS SCIENCE

2-s2.0-85099779019

Scopus

1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,No. 1088, Xueyuan Road,518055,China
2.Department of Mechanical Engineering,University of Hong Kong,999077,Hong Kong
3.School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai,200240,China

Zhou，Xingying,Wang，Fang,Zhang，Xinquan,et al. Electrochemical polishing of microfluidic moulds made of tungsten using a bi-layer electrolyte[J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY,2021,292.

Zhou，Xingying,Wang，Fang,Zhang，Xinquan,&Deng，Hui.(2021).Electrochemical polishing of microfluidic moulds made of tungsten using a bi-layer electrolyte.JOURNAL OF MATERIALS PROCESSING TECHNOLOGY,292.

Zhou，Xingying,et al."Electrochemical polishing of microfluidic moulds made of tungsten using a bi-layer electrolyte".JOURNAL OF MATERIALS PROCESSING TECHNOLOGY 292(2021).