南方科技大学知识苑(SUSTech KC): Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling

题名	Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling
作者	Wang，Gang1 ; Zhai，Yufei2,3 ; Lv，Chenghao 1; Fan，Wenjing2,3 ; Zhao，Cong2,3 ; Wang，Min2,3
通讯作者	Wang，Min
发表日期	2021-02-01
DOI	10.1016/j.mee.2021.111511
发表期刊	MICROELECTRONIC ENGINEERING 影响因子和分区
ISSN	0167-9317
EISSN	1873-5568
卷号	238
摘要	Metal grids have great potential in flexible transparent conductive electrodes (E-TCEs) due to their high conductivity and transparency. Unlike other TCEs, the sheet resistance and optical transmittance of metal grids can be independently adjusted. However, the large surface roughness resulted from thickened metal layer may increase the risk of electrical short-circuiting for optoelectronic devices. In this paper, a TCE of Au-grid embedded in polydimethylsiloxane (PDMS) has been developed by an electrochemical-assisted peeling technique. By a sacrificial etching and transfer process, a smooth surface of Au/PDMS is achieved. The fabricated Au/PDMS TCE shows a surface roughness of 15 nm, a sheet resistance of 8.03 Ω/sq., an optical transmittance of 95.04% and a figure of merit (FoM) of 910. In addition, the mechanical stability of fabricated TCE is also investigated by 10,000 cycles bending with a bending radius of 2 mm. Using the fabricated TCE, a flexible alternating-current-driven electroluminescent (ACEL) device is demonstrated and evaluated, which confirms the use of Au/PDMS TCEs in optoelectronic applications.
关键词	Electrochemical-assisted peeling Metal grid Sheet resistance Transmittance Transparent conductive electrode
相关链接	[Scopus记录]
收录类别	SCI ; EI
语种	英语
学校署名	第一 ; 通讯
资助项目	Natural Science Foundation of China[61805114] ; Natural Science Foundation of Guangdong Province[2018A030310123]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Optics ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
WOS记录号	WOS:000626131100007
出版者	ELSEVIER
EI入藏号	20210509860160
EI主题词	Etching ; Mechanical stability ; Microgrids ; Opacity ; Optoelectronic devices ; Polydimethylsiloxane ; Sheet metal ; Sheet resistance ; Silicones ; Surface roughness ; Transparent electrodes
EI分类号	Light/Optics:741.1 ; Optical Devices and Systems:741.3 ; Chemical Reactions:802.2 ; Organic Polymers:815.1.1 ; Physical Properties of Gases, Liquids and Solids:931.2 ; Electric Variables Measurements:942.2
ESI学科分类	ENGINEERING
Scopus记录号	2-s2.0-85100073267
来源库	Scopus
引用统计	被引频次[WOS]：5
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/221659
专题	工学院_力学与航空航天工程系工学院_深港微电子学院
作者单位	1.Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,518055,China 2.School of Microelectronics,Southern University of Science and Technology,Shenzhen,518055,China 3.Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen,518055,China
第一作者单位	力学与航空航天工程系
通讯作者单位	深港微电子学院; 南方科技大学
第一作者的第一单位	力学与航空航天工程系
推荐引用方式 GB/T 7714	Wang，Gang,Zhai，Yufei,Lv，Chenghao,et al. Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling[J]. MICROELECTRONIC ENGINEERING,2021,238.
APA	Wang，Gang,Zhai，Yufei,Lv，Chenghao,Fan，Wenjing,Zhao，Cong,&Wang，Min.(2021).Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling.MICROELECTRONIC ENGINEERING,238.
MLA	Wang，Gang,et al."Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling".MICROELECTRONIC ENGINEERING 238(2021).