Optimization of MEMS Vibration Energy Harvester With Perforated Electrode

Luo，Anxin1; Zhang，Yulong2; Guo，Xinge3; Lu，Yan4; Lee，Chengkuo3; Wang，Fei5

2021-04

10.1109/JMEMS.2021.3058766

Journal of Microelectromechanical Systems   影响因子和分区

1941-0158

Energy harvesting microelectromechanical systems (MEMS) air damping perforated electrode

SCI ; EI

第一

20210910015597

Damping ; Electrodes ; Energy dissipation ; Squeeze films

Energy Losses (industrial and residential):525.4 ; Energy Conversion Issues:525.5 ; Mechanics:931.1

ENGINEERING

IEEE

1.School of Microelectronics, Southern University of Science and Technology (SUSTech), Shenzhen 518055, China, also with the Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, Southern University of Science and Technology (SUSTech), Shenzhen 518055, China, also with the Institute of Microelectronics, University of Macau (UM), Taipa, Macau, also with the State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau (UM), Taipa, Macau, and also with the Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau (UM), Taipa, Macau.
2.College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China.
3.Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576.
4.Institute of Microelectronics, University of Macau (UM), Taipa, Macau, also with the State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau (UM), Taipa, Macau, and also with the Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau (UM), Taipa, Macau.
5.School of Microelectronics, SUSTech, Shenzhen 518055, China, and also with the Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, SUSTech, Shenzhen 518055, China (e-mail: wangf@sustech.edu.cn)

Luo，Anxin,Zhang，Yulong,Guo，Xinge,et al. Optimization of MEMS Vibration Energy Harvester With Perforated Electrode[J]. Journal of Microelectromechanical Systems,2021,30(2):299-308.

Luo，Anxin,Zhang，Yulong,Guo，Xinge,Lu，Yan,Lee，Chengkuo,&Wang，Fei.(2021).Optimization of MEMS Vibration Energy Harvester With Perforated Electrode.Journal of Microelectromechanical Systems,30(2),299-308.

Luo，Anxin,et al."Optimization of MEMS Vibration Energy Harvester With Perforated Electrode".Journal of Microelectromechanical Systems 30.2(2021):299-308.