南方科技大学知识苑(SUSTech KC): Optimization of MEMS Vibration Energy Harvester With Perforated Electrode

题名	Optimization of MEMS Vibration Energy Harvester With Perforated Electrode
作者	Luo，Anxin1 ; Zhang，Yulong 2; Guo，Xinge 3; Lu，Yan 4; Lee，Chengkuo 3; Wang，Fei5
发表日期	2021-04
DOI	10.1109/JMEMS.2021.3058766
发表期刊	Journal of Microelectromechanical Systems 影响因子和分区
ISSN	1941-0158
卷号	30 期号:2页码:299-308
关键词	Energy harvesting microelectromechanical systems (MEMS) air damping perforated electrode
相关链接	[IEEE记录]
收录类别	SCI ; EI
学校署名	第一
EI入藏号	20210910015597
EI主题词	Damping ; Electrodes ; Energy dissipation ; Squeeze films
EI分类号	Energy Losses (industrial and residential):525.4 ; Energy Conversion Issues:525.5 ; Mechanics:931.1
ESI学科分类	ENGINEERING
来源库	IEEE
全文链接	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9360317
引用统计	被引频次[WOS]：14
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/221781
专题	工学院_深港微电子学院
作者单位	1.School of Microelectronics, Southern University of Science and Technology (SUSTech), Shenzhen 518055, China, also with the Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, Southern University of Science and Technology (SUSTech), Shenzhen 518055, China, also with the Institute of Microelectronics, University of Macau (UM), Taipa, Macau, also with the State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau (UM), Taipa, Macau, and also with the Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau (UM), Taipa, Macau. 2.College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China. 3.Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576. 4.Institute of Microelectronics, University of Macau (UM), Taipa, Macau, also with the State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau (UM), Taipa, Macau, and also with the Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau (UM), Taipa, Macau. 5.School of Microelectronics, SUSTech, Shenzhen 518055, China, and also with the Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, SUSTech, Shenzhen 518055, China (e-mail: wangf@sustech.edu.cn)
第一作者单位	深港微电子学院
第一作者的第一单位	深港微电子学院
推荐引用方式 GB/T 7714	Luo，Anxin,Zhang，Yulong,Guo，Xinge,et al. Optimization of MEMS Vibration Energy Harvester With Perforated Electrode[J]. Journal of Microelectromechanical Systems,2021,30(2):299-308.
APA	Luo，Anxin,Zhang，Yulong,Guo，Xinge,Lu，Yan,Lee，Chengkuo,&Wang，Fei.(2021).Optimization of MEMS Vibration Energy Harvester With Perforated Electrode.Journal of Microelectromechanical Systems,30(2),299-308.
MLA	Luo，Anxin,et al."Optimization of MEMS Vibration Energy Harvester With Perforated Electrode".Journal of Microelectromechanical Systems 30.2(2021):299-308.