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题名

Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient

作者
通讯作者Xiao,Chen
发表日期
2021-07-01
DOI
发表期刊
ISSN
0301-679X
卷号159
摘要
Mechanical activation in mechanical removal of GaN using diamond tip and mechanochemical removal using AlO tip are described by the Archard equation and mechanically assisted Arrhenius-type kinetic model, respectively. Evident material-removal under elastic contact occurs with the assistance of interfacial mechanochemical reactions. By analyzing the mechanochemical reactions with Arrhenius-type kinetic model and Hertzian contact mechanics, the critical activation volume and activation barrier are determined semiquantitatively. The mechanical activation originating from the chemically active counter-surface facilitates the mechanochemical atomic attrition by altering the energy barrier of the reaction kinetics. This work can provide deep insights into the mechanochemical-removal mechanism of GaN.
关键词
相关链接[Scopus记录]
收录类别
SCI ; EI
语种
英语
学校署名
其他
WOS记录号
WOS:000639801800001
EI入藏号
20211410166735
EI主题词
Alumina ; Aluminum oxide ; Deformation ; Gallium nitride ; III-V semiconductors ; Kinetic parameters ; Kinetic theory ; Reaction kinetics ; Surface reactions
EI分类号
Fluid Flow, General:631.1 ; Semiconducting Materials:712.1 ; Chemical Reactions:802.2 ; Chemical Products Generally:804 ; Inorganic Compounds:804.2 ; Classical Physics; Quantum Theory; Relativity:931
ESI学科分类
ENGINEERING
Scopus记录号
2-s2.0-85103377834
来源库
Scopus
引用统计
被引频次[WOS]:55
成果类型期刊论文
条目标识符http://sustech.caswiz.com/handle/2SGJ60CL/222607
专题工学院_机械与能源工程系
作者单位
1.School of Mechanical Engineering,University of South China,Hengyang,421001,China
2.Tribology Research Institute,State Key Laboratory of Traction Power,Southwest Jiaotong University,Chengdu,610031,China
3.Advanced Research Center for Nanolithography (ARCNL),Amsterdam,Science Park 106,1098XG,Netherlands
4.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,518055,China
推荐引用方式
GB/T 7714
Guo,Jian,Xiao,Chen,Gao,Jian,et al. Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient[J]. TRIBOLOGY INTERNATIONAL,2021,159.
APA
Guo,Jian.,Xiao,Chen.,Gao,Jian.,Li,Gengzhuo.,Wu,Hanqiang.,...&Qian,Linmao.(2021).Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient.TRIBOLOGY INTERNATIONAL,159.
MLA
Guo,Jian,et al."Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient".TRIBOLOGY INTERNATIONAL 159(2021).
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