Polishing and planarization of single crystal diamonds: State-of-the-art and perspectives

Luo，Hu1; Ajmal，Khan Muhammad1; Liu，Wang1; Yamamura，Kazuya2; Deng，Hui1

2021-04-01

10.1088/2631-7990/abe915

International Journal of Extreme Manufacturing   影响因子和分区

2631-8644

2631-7990

Diamond is a promising material for the modern industry. It is widely used in different applications, such as cutting tools, optical windows, heat dissipation, and semiconductors. However, these application areas require exceptionally flattened and polished diamond surfaces. Unfortunately, due to the extreme hardness and chemical inertness of diamond, the polishing of diamond is challenging. Since the 1920s, various conventional and modern mechanical, chemical, and thermal polishing techniques have been proposed and developed for finishing diamond surfaces. Therefore, to impart proper guidance on selecting a good polishing technique for production practice, this paper presents an in-depth and informative literature survey of the current research and engineering developments regarding diamond polishing. At first, a brief review of the general developments and basic material removal principles is discussed. This review concludes with a detailed analysis of each techniques' polishing performance and critical challenges, and a discussion of the new insights and future applications of diamond polishing.

Chemical reaction Diamond polishing Material removal anisotropy Surface quality Ultra-smooth surface

ESCI ; EI

英语

第一 ; 通讯

WOS:000674747200003

20211410182023

Chemical mechanical polishing ; Cutting tools ; Diamonds ; Polishing ; Single crystals

Geology:481.1 ; Gems:482.2.1 ; Machine Tool Accessories:603.2 ; Machining Operations:604.2 ; Crystalline Solids:933.1

2-s2.0-85103571964

Scopus

1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen, Guangdong,No. 1088, Xueyuan Road,518055,China
2.Graduate School of Engineering,Osaka University,Suita, Osaka,2-1 Yamadaoka,Japan

Luo，Hu,Ajmal，Khan Muhammad,Liu，Wang,et al. Polishing and planarization of single crystal diamonds: State-of-the-art and perspectives[J]. International Journal of Extreme Manufacturing,2021,3(2).

Luo，Hu,Ajmal，Khan Muhammad,Liu，Wang,Yamamura，Kazuya,&Deng，Hui.(2021).Polishing and planarization of single crystal diamonds: State-of-the-art and perspectives.International Journal of Extreme Manufacturing,3(2).

Luo，Hu,et al."Polishing and planarization of single crystal diamonds: State-of-the-art and perspectives".International Journal of Extreme Manufacturing 3.2(2021).