Rapid Gas Sensing Based on Pulse Heating and Deep Learning

Hu，Yushen; Tian，Ye; Zhuang，Yi; Zhao，Changhui; Wang，Fei

10.1109/MEMS51782.2021.9375312

2021-01-25

34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999

978-1-6654-3024-1

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2021-January

438-441

JAN 25-29, 2021

Gainesville, FL, USA

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

We have reported a rapid sensing method for MEMS gas sensors based on the combination of pulse heating and deep learning. Pulse heating is used to reduce the power consumption of MEMS gas sensor and to realize the rapid gas sensing process. The output signals of the gas sensor are extracted and assigned with different weights according to their importance by deep learning algorithm during data processing. Afterwards, we have used two prediction methods to verify the accuracy of this method. One is to randomly select part of the measurement data as the test sets, which results in an average relative error of 4%. The other method is using the data of the first two days as the training sets to build the model, which could be used to predict the test sets of the third day and the best average relative error of 3.2% is achieved.

deep learning feature extraction MEMS gas sensor pulse heating

第一

英语

CPCI-S ; EI

Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000667731600106

20211410171494

Chemical detection ; Chemical sensors ; Data handling ; Gas detectors ; Gases ; Learning algorithms ; Mechanics ; MEMS

Electric Equipment:704.2 ; Data Processing and Image Processing:723.2 ; Chemistry:801 ; Accidents and Accident Prevention:914.1 ; Mechanics:931.1

2-s2.0-85103466158

Scopus

Southern University of Science and Technology,School of Microelectronics,Shenzhen,China

Hu，Yushen,Tian，Ye,Zhuang，Yi,et al. Rapid Gas Sensing Based on Pulse Heating and Deep Learning[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2021:438-441.