A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS

Jing，Jixiang1,2; An，Xiaoshuai1; Luo，Yumeng1; Chen，Liang1; Chu，Zhiqin3; Li，Kwai Hei1,4,5

2021

10.1021/acsaelm.1c00130

ACS Applied Electronic Materials   影响因子和分区

2637-6113

Pressure sensing based on high-sensitivity and fast-response photonic devices is essential for various transient and dynamic processes in diverse fields. Therefore, a miniaturized device being capable of precise and reliable detection is highly desired for the development of optical pressure sensors. Here, we develop a compact pressure sensor, showing a sensitivity of 1 μA/kPa and a fast response time of <10 ms, based on a III-nitride photonic chip combined with a PDMS membrane on submillimeter-scale footprints. The emitter and detector are monolithically integrated on a GaN-on-sapphire chip consisting of InGaN/GaN multiquantum wells, enabling quantitative readout for pressure sensing. Self-assembled polystyrene nanospheres are embedded in the PDMS layer and function as an opal-based photonic crystal, transforming the received mechanical signals into optical signals which can be precisely determined through recorded photocurrent. This underlying mechanism of angle-dependent reflective characteristics via the photonic bandgap effect is well fitted by our theoretical simulation. Sensors with opal films embedded at different vertical positions are fabricated, and their corresponding performance is systematically studied and compared through a series of pressure loading/unloading tests. The demonstrated high repeatability, stability, and durability of the developed chip-scale optical pressure sensor, paving the way for its widespread usage.

gallium nitride nanospheres PDMS photonic integration pressure sensing

SCI ; EI

英语

第一 ; 通讯

WOS:000656986700003

20212210422318

Gallium nitride ; III-V semiconductors ; Microchannels ; Nanospheres ; Nitrides ; Photocurrents ; Pressure sensors ; Sapphire

Gems:482.2.1 ; Electricity: Basic Concepts and Phenomena:701.1 ; Light/Optics:741.1 ; Nanotechnology:761 ; Inorganic Compounds:804.2 ; Solid State Physics:933 ; Pressure Measuring Instruments:944.3

2-s2.0-85106408100

Scopus

1.School of Microelectronics,Southern University of Science and Technology,Shenzhen,518055,China
2.Department of Electrical and Electronic Engineering,University of Hong Kong,Pokfulam Road,Hong Kong
3.Department of Electrical and Electronic Engineering,School of Biomedical Sciences,University of Hong Kong,Pokfulam Road,Hong Kong
4.Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen,518055,China
5.Engineering Research Center of Three Dimensional Integration in Guangdong Province,Southern University of Science and Technology,Shenzhen,518055,China

Jing，Jixiang,An，Xiaoshuai,Luo，Yumeng,et al. A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS[J]. ACS Applied Electronic Materials,2021,3:1982-1987.

Jing，Jixiang,An，Xiaoshuai,Luo，Yumeng,Chen，Liang,Chu，Zhiqin,&Li，Kwai Hei.(2021).A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS.ACS Applied Electronic Materials,3,1982-1987.

Jing，Jixiang,et al."A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS".ACS Applied Electronic Materials 3(2021):1982-1987.