双面微结构介质柔性触觉传感器的制作与性能研究

FABRICATION AND PERFORMANCE OF DOUBLE-SIDED MICROSTRUCTURE DIELECTRIC FLEXIBLE TACTILE SENSORS

邓竣

11930262

硕士

材料工程

牛玉娟

2021-05-20

2021-06-24

南方科技大学

深圳

柔性电子科学技术的进步使触觉传感器在电子皮肤、智能家居、及人体运动和健康状态检测的柔性可穿戴器件中的应用受到广泛关注。随着这类电子产品的市场需求逐渐增加，柔性触觉传感器显示出广阔的应用前景。为了获得高灵敏度且能应用于人体健康监测的柔性触觉传感器，本文设计了一种双面微结构介质层的电容式触觉传感器。通过选用离子凝胶作为传感器的介质层材料，利用模板法复刻砂纸表面反向微结构，制备了具有双面微结构的离子凝胶介质层，并组装基于该双面介质层的柔性触觉传感器。与通常的单面微结构相比较，基于该双面微结构介质层的触觉传感器对外界压力显示出更高的灵敏度。由于完美的结合了离子凝胶材料、砂纸表面独特的微结构、以及介质层双面结构设计，使得该触觉传感器在外力作用下在电极和介质层间形成逐渐增多的双电层电容，进而呈现出显著的电容变化现象，即高的灵敏度。而且，对传感性能分析结果表明，该传感器对不同外力作用呈现出典型的分段式敏感响应性。在低压强区域(0-13 kPa)，其灵敏度为29.6 kPa-1，高于大部分的文献报道结果；在中压强区间(13-67 kPa)和高压强区域(67-180 kPa),灵敏度分别降为7.2 kPa-1和3.3 kPa-1。同时，该传感器具有较低的检测极限(5.2 Pa)和良好的响应时间(260 ms)，以及在循环加压卸压测试、持续加压测试和高压分辨率测试中表现优异。此外，该传感器在人体运动（手指弯曲、走路膝盖弯曲）和脉搏跳动监测等方面表现出良好的可应用性，显示了在人体健康和运动状态监测及电子皮肤等柔性可穿戴器件中巨大的应用潜力。

With the development of flexible electronic science and technology, the flexible tactile sensors used in electronic skin, smart home, and flexible wearable devices for human movement and health detection has attracted extensive attention. Due to the increasing market demand for this kind of electronic product, flexible tactile sensors show broad application prospects. This thesis designed a capacitive tactile sensor based on the double-sided micro-structure dielectric layer to obtain the tactile sensor with high sensitivity and applied it for human health monitoring. First, the dielectric layer with double-sided microstructure was prepared using the ionic gel material and the template method, which was used to reproduce the reverse microstructure of the sandpaper surface. Then a flexible tactile sensor based on the double-sided dielectric layer was assembled. This tactile sensor shows a higher sensitivity to external pressure compared with the typical single-sided microstructure. Because of the perfect combination of the ionic gel material, unique microstructure of sandpaper surface, and double-sided structure design of dielectric layer, the tactile sensor forms gradually increasing double electric layer capacitance between electrodes and dielectric layer under the action of external force, and then presents significant capacitance change phenomenon, namely high sensitivity. Moreover, the analysis results of the sensor performance show that the sensor presents a typical segmented sensitive response to different external forces. Obviously, in the low-pressure region(0-13 kPa), the sensitivity is 29.6 kPa-1, which is higher than most reported results. In the medium pressure range(13-67 kPa) and the high-pressure range(67-180 kPa), the sensitivity is reduced to 7.2 kPa-1 and 3.3 kPa-1, respectively. Meanwhile, the sensor has a low detection limit(5.2 Pa), a good response time(260 ms), and excellent performance in cyclic pressure relief tests, continuously added pressure tests and resolution tests at high pressures. In addition, the sensor shows good applicability in human limb movement(finger bending, walking knee bending) and pulse monitoring, which shows excellent application potential in electronic skin and flexible wearable devices for human health and movement status monitoring.

柔性触觉传感器 离子凝胶 双面微结构 高灵敏度 健康监测

flexible tactile sensor ion gel double-sided microstructure high sensitivity health monitoring

中文

独立培养

南方科技大学

邓竣. 双面微结构介质柔性触觉传感器的制作与性能研究[D]. 深圳. 南方科技大学,2021.