钙钛矿太阳能电池透明电极的制备与研究

钙钛矿太阳能电池由于其快速提高的光电转化效率成为目前国内外研究的热点。目前许多研究都是基于寻找合适的界面层和钝化材料来改善钙钛矿太阳能电池器件的整体性能，然而利用这些办法进一步提高钙钛矿太阳能电池性能的空间有限。钙钛矿太阳能电池透明电极作为导电层和光透过层，其导电率、能级、透光率等参数对钙钛矿太阳能电池器件的性能具有重要的影响。本论文从ITO薄膜的磁控溅射制备工艺和透明导电机理研究入手，详细分析了磁控溅射制备参数例如氧气流量、溅射功率、沉积厚度以及基板温度对ITO薄膜性能的影响，并通过简单的紫外氯化、酸碱、抛光等表面处理进一步调整ITO薄膜的性能，得到了ITO薄膜作为钙钛矿太阳能电池透明电极的最佳制备参数。与商用相比基于实验制备ITO薄膜作为透明电极的钙钛矿太阳能电池效率从19.06%提升到了20.40%，经过两性离子钝化后器件效率进一步提升到了20.75%。

Perovskite solar cells have been one of the research hotspots owing to its rapidly increased efficiency. Many strategies have been developed for enhancing the performance of perovskite solar cells, such as exploring novel interface transporting layer and interfacial passivation. However, with the efficiency approaching the theoretical limit, the enhancing effect of these methods increasingly limited. On the other hand, as the conductive layer and light transporting layer, the properties of transparent electrode, such as electrical conductivity, energy level and transmittance, are key role for the performance of perovskite solar cells. This paper has analyzed the effects of magnetron sputtering parameters such as oxygen flow rate, sputtering power, deposition thickness and substrate temperature on the properties of ITO films in detail through optimizing magnetron sputtering preparation technology and studying the growth mechanism of transparent conductive ITO film. Also, some simple surface treatment methods, such as ultraviolet chlorination, acid-base and polishing have been further developed to improve the properties of ITO films by means of simple. Based on our results, the efficiency of perovskite solar cell devices are improved from 19.06% to 20.40% comparing to commercial ITO. Finally, the device efficiency is further improved to 20.75% after amphoteric ion passivation.