LTCC玻璃陶瓷结晶行为及界面反应对低温烧结致密化的影响

THE EFFECT OF LTCC GLASS-CERAMIC CRYSTALLIZATION BEHAVIOR AND INTERFACE REACTION ON LOW-TEMPERATURE SINTERING DENSIFICATION

陈天成

11930219

硕士

材料工程

于洪宇

2021-05-19

2021-06-18

南方科技大学

深圳

近年来，物联网在人们生活中应用越来越普遍，5G通讯也将在不久的将来遍布我们日常生活，因此对电子元器件的“高频化”和“小型化”的要求也越来越高。秉承介电陶瓷优于介电聚合物的固有优点，在未来5G技术和智能器件领域，LTCC（low temperature co-fired ceramic）技术将成为未来技术发展和推广的主要推动力之一。LTCC技术在微波通讯器件和模组（2D和3D结构设计）和高功率、高散热、电磁兼容等高性能器件领域都有广泛的应用，它借助玻璃的低软化点和低熔点，制备玻璃-陶瓷复合材料，实现陶瓷的低温致密化；同时，与高导电金属（Au、Ag、Cu）的低温叠层共烧，有利于高导电金属金属化的平行工艺制备。目前，商业LTCC大多数使用高玻璃组分的设计，玻璃的体积含量高达（40~80 vol%），而高比例的玻璃含量影响LTCC的介电性能和热学性能。不适宜在5G应用环境中更佳地发挥介电微波陶瓷的固有特性。因此本论文的研究重点将聚焦在低比例玻璃含量（10-50 vol%）LTCC材料体系。同时本文也将研究LTCC玻璃陶瓷结晶行为及界面反应对低温烧结致密化的影响，以期能探索控制及抑制析出相和界面相目标的新途径和新思路。基于这一思路，本文设计了两种实施方案，第一种是以硼硅基玻璃B2O3-SiO2为主要玻璃形成剂；第二种实施方案基于高硼硅比玻璃（SiO2/B2O3＜1:1）为主，添加低含量改性剂以期生成硼酸盐类析出相。最后以XRD（X-ray diffraction），DSC（differential scanning calorimetry），STEM（scanning transmission electron microscopy）为测试手段验证。

In recent years, the application of Internet of things in people's life is more and more common, 5G communication will also spread throughout our daily life in the near future, so the requirements of "high frequency" and "miniaturization" of electronic components are also higher and higher. Adhering to the inherent advantages of dielectric ceramics over dielectric polymers, LTCC technology will become one of the main driving forces for the future development and promotion of 5g technology and intelligent devices. LTCC technology is widely used in microwave communication devices and modules (2D and 3D structure design) and high-power, high heat dissipation, electromagnetic compatibility and other high-performance devices; At the same time, co-firing with high conductivity metals (AU, Ag, Cu) at low temperature is conducive to the parallel process of high conductivity metallization. At present, most commercial LTCC use the design of high glass composition, the volume content of glass is as high as 40 ~ 80 vol%, and the high proportion of glass content affects the dielectric and thermal properties of LTCC. It is not suitable for 5G application environment to give full play to the inherent characteristics of dielectric microwave ceramics. Therefore, this paper will focus on the LTCC material system with low glass content (10-50 vol%). At the same time, the effects of crystallization behavior and interfacial reaction on the densification of LTCC glass ceramics are also studied in order to explore new ways and ideas to control and inhibit the precipitation and interfacial phase. Based on this idea, two implementation schemes are designed in this paper. The first is to use borosilicate based glass B2O3-SiO2 as the main glass forming agent; The second implementation scheme is based on high borosilicate glass (SiO2 / B2O3 < 1:1), adding low content modifier to form borate precipitates. Finally, XRD, DSC and STEM were used to verify the results.

LTCC 硼硅基玻璃 致密性 高硼硅比玻璃 低温烧结

LTCC borosilicate glass compactness high borosilicate glass low temperature sintering

中文

独立培养

南方科技大学

陈天成. LTCC玻璃陶瓷结晶行为及界面反应对低温烧结致密化的影响[D]. 深圳. 南方科技大学,2021.