SULFONATION OF POLY(PHTHALAZINONE ETHER KETONE) FOR MEMS HUMIDITY SENSOR

Leng, Xiaohui1; Wang, Yiming1; Wang, Fei1,2

10.1109/MEMSYS.2018.8346605

2018

1084-6999

978-1-5386-4783-7

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

2018-January

523-526

21-25 Jan. 2018

Belfast, United kingdom

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

A simple sulfonation process for Poly(phthalazinone ether ketone) (PPEK) was proposed with concentrated sulfonic acid. Various degrees of sulfonation (DS) were realized through the control of reaction time and temperature. Then, sulfonated PPEK (SPPEK) was applied in humidity sensors with MEMS electrodes. Both spray-coating and drop-casting methods were used to optimize the sensing performance. DS influence on the behavior of humidity sensors was investigated with the optimum coating method.

Humidity Sensitivity Electrodes Micromechanical devices Temperature sensors Fabrication

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Natural Science Funds[2015A030313812] ; Guangdong Natural Science Funds[2016A030306042]

Engineering

Engineering, Electrical & Electronic ; Engineering, Mechanical

WOS:000434960900140

20182105215242

Coatings ; Ethers ; Humidity sensors ; Ketones ; Mechanics ; Sulfonation

Meteorological Instrumentation:443.2 ; Electric Equipment:704.2 ; Chemical Reactions:802.2 ; Organic Compounds:804.1 ; Coating Materials:813.2 ; Mechanics:931.1

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, Peoples R China
2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

Leng, Xiaohui,Wang, Yiming,Wang, Fei. SULFONATION OF POLY(PHTHALAZINONE ETHER KETONE) FOR MEMS HUMIDITY SENSOR[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2018:523-526.