A Micro-Hotplate for MEMS Based Gas Sensor

Niu, Gaoqiang1; He, Lingxiang2; Yang, Zhitao1; Zhao, Changhui1; Gong, Hiuming1; He, Wei2; Wang, Fei1

10.1109/ICEPT.2018.8480572

2018

2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT)

749-752

Shanghai, China

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This work designed a micro-hotplate for micro-electromechanical systems (HEMS) based gas sensor, in which the heating electrode and the test electrode are placed on the same plane. The micro-hotplate with four pins was optimized the finite element analysis method. The heating electrode and test electrode were made of platinum. The working temperature of heating electrode was controlled by the voltage of heating electrode and calibrated through the linear resistance-temperature characteristic curve and relation curve of voltage and resistance. Infrared thermography microscope directly observed the temperature distribution of the heating electrode at different voltages. The micro-hotplate was used for ethanol detecting based on SnO2 nanosheets and the response reached at 21.4 in 100 ppm ethanol gas.

micro-hotplate MEMS gas sensor

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Natural Science Funds for Distinguished Young Scholar[2016A030306042]

Engineering

Engineering, Electrical & Electronic

WOS:000450155700161

20184606075916

Electrodes ; Electronics packaging ; Ethanol ; Gas detectors ; Heating ; MEMS

Electric Equipment:704.2 ; Chemistry:801 ; Organic Compounds:804.1 ; Accidents and Accident Prevention:914.1

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, Peoples R China
2.Shenzhen Univ, Dept Optoelectron Engn, Shenzhen, Peoples R China

Niu, Gaoqiang,He, Lingxiang,Yang, Zhitao,et al. A Micro-Hotplate for MEMS Based Gas Sensor[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2018:749-752.