Optimization of Electrostatic Energy Harvesting Device with Multi-step Structure

Guo, Xinge1; Zhang, Yulong1; Wang, Fei1,2,3

10.1109/NEMS.2018.8556985

2018

2474-3747

2474-3755

978-1-5386-5274-9

2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018)

167-172

22-26 April 2018

10 Scotts Road, Singapore, Singapore

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

In this paper, we have studied the influence of gap distance between two plates, excitation amplitude, height of stoppers and the surface potential of the pre-charged electret of electrostatic energy harvesting device with an out-of-the-plane gap closing scheme. Simulink is used to calculate the power output from various accelerations with a series of gap distances, various surface potential with the same gap and various stoppers with a series of surface potentials. A shift of the resonant frequency is noticed which is further confirmed by experiments. And the "pull-in" effect of the electrostatic energy harvesting device is also studied. To avoid the effect, we have designed and fabricated multi-step structure with various heights using Si anisotropic etching. All devices are tested with the same proof mass, and parameters such as stopper height and gap distance have been studied with diverse designs. The experimental results are in good agreement with our simulation.

Performance evaluation Electric potential Software packages Resonant frequency Silicon Regulation Energy harvesting

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Special Support Program[2015TQ01X555]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology

WOS:000465198300038

20190406416610

Electrostatics ; Natural frequencies ; Surface potential

Energy Conversion Issues:525.5 ; Electricity: Basic Concepts and Phenomena:701.1

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, Peoples R China
2.Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China
3.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

Guo, Xinge,Zhang, Yulong,Wang, Fei. Optimization of Electrostatic Energy Harvesting Device with Multi-step Structure[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2018:167-172.