MEMS Electrostatic Energy Harvesting Device with Spray Coated Electret

Luo, Anxin1; Xu, Yixin1; Chen, Siyan1; Dong, Hanning1; Zhang, Yulong1,2; Wang, Fei1,2

10.1109/3M-NANO.2017.8286330

2017

2373-5422

978-1-5386-1082-4

2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)

2018-January

134-137

7-11 Aug. 2017

Shanghai, China

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 1318 mm(2). With the matched resistance of 21 M Omega, an output power of 12 mu W is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s(2). The thermal stability of this device is tested on 100 degrees C, decent power can be output after 34 hours.

Electret energy harvesting stability spray coating

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Natural Science Funds for Distinguished Young Scholar[2016A030306042]

Engineering ; Science & Technology - Other Topics

Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology

WOS:000426927300028

20182205249162

Convergence of numerical methods ; Electrets ; Electrostatic generators ; Electrostatics ; Manufacture ; Nanotechnology ; Natural frequencies ; Thermodynamic stability

Energy Conversion Issues:525.5 ; Heat Treatment Processes:537.1 ; Thermodynamics:641.1 ; Electricity: Basic Concepts and Phenomena:701.1 ; Dielectric Materials:708.1 ; Nanotechnology:761 ; Numerical Methods:921.6

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, Peoples R China
2.Shenzhen Key Lab 3rd Generat Semicond Devices, Shenzhen, Peoples R China

Luo, Anxin,Xu, Yixin,Chen, Siyan,et al. MEMS Electrostatic Energy Harvesting Device with Spray Coated Electret[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2017:134-137.