ELECTRET BASED MICRO ENERGY HARVESTING DEVICE WITH BOTH BROAD BANDWIDTH AND HIGH POWER DENSITY FROM OPTIMAL AIR DAMPING

Zhang, Yulong1; Hu, Yushen1; Chen, Siyan1; Peng, Zhuoteng1; Li, Xinxin2; Wang, Fei1; IEEE

10.1109/TRANSDUCERS.2017.7994061

2017

2167-0021

978-1-5386-2733-4

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)

355-358

18-22 June 2017

Kaohsiung, Taiwan

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This paper presents an electret based vibration energy harvester, which has excellent performance with both broad bandwidth and high normalized power density (NPD). Wafer-level MEMS fabrication process is proposed with detailed study on the packaging pressure and air damping effect. With an overall volume of about 0.187 cm(3), the harvester can generate a maximum power of 4.95 mu W with bandwidth of 12 Hz and NPD of 3 mWcm(-3) g(-2) at 3 Pa. The broad bandwidth of the device makes it possible to harvest the energy from random vibrations, and makes it feasible to pile up multi-device stacks for better power output. The all-round performance of the device shows promising applications for the wireless sensor networks technology.

Energy harvesting Electret Broad bandwidth Normalized power density Air damping

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Natural Science Funds for Distinguished Young Scholar[2016A030306042]

Engineering

Engineering, Electrical & Electronic

WOS:000426701400089

20173804171518

Actuators ; Bandwidth ; Damping ; Electrets ; Energy harvesting ; Microsystems ; Piles ; Product development ; Wireless sensor networks

Structural Members and Shapes:408.2 ; Energy Conversion Issues:525.5 ; Dielectric Materials:708.1 ; Information Theory and Signal Processing:716.1 ; Radio Systems and Equipment:716.3 ; Control Equipment:732.1 ; Control Instrumentation:732.2 ; Product Development; Concurrent Engineering:913.6 ; Mechanics:931.1

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
2.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

Zhang, Yulong,Hu, Yushen,Chen, Siyan,et al. ELECTRET BASED MICRO ENERGY HARVESTING DEVICE WITH BOTH BROAD BANDWIDTH AND HIGH POWER DENSITY FROM OPTIMAL AIR DAMPING[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2017:355-358.