Wideband MEMS Electrostatic Energy Harvester With Dual Resonant Structure

Zhang, Yulong1; Luo, Anxin1; Xu, Yixin1; Wang, Tianyang1; Wang, Fei1,2; IEEE

10.1109/ICSENS.2016.7808945

2016

21689229

978-1-4799-8288-2

2016 IEEE SENSORS

0

1-3

30 Oct.-3 Nov. 2016

Orlando, FL, United states

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

In this paper, we propose the design and test of a wideband MEMS electrostatic energy harvester with a dual resonant structure based on the out-of-the-plane gap closing scheme. It is fabricated using advanced MEMS technology, and the overall size is about 13 x 18 mm(2), and comparing to traditional devices with single resonant frequency, the proposed device with dual resonant structure can resonate at two frequencies, which could provide strong mechanical coupling between the two subsystems at low vibration amplitude. Therefore, this device can harvest a decent power output from vibration sources at a broad frequency range near its two resonant frequencies. During the test, continuous power output up to 1.06-3.24 mu W can be achieved under external vibration amplitude of 9.8 m/s(2) (similar to 1g) at a frequency range from 141.6 Hz to 191.1 Hz, which means the bandwidth of the device is about 30% of the central frequency. In random vibration test, the device also shows a good performance, and provides a promising application for energy harvesting from the scenarios with random vibration sources.

Energy harvester MEMS technology Broadband Dual resonant structure Electrete

第一 ; 通讯

英语

CPCI-S ; EI

Guangdong Natural Science Funds for Distinguished Young Scholar[2016A030306042]

Engineering ; Remote Sensing

Engineering, Electrical & Electronic ; Remote Sensing

WOS:000399395700524

20170503313188

Electrostatic generators ; Electrostatics ; Energy harvesting ; Natural frequencies

Energy Conversion Issues:525.5 ; Electricity: Basic Concepts and Phenomena:701.1 ; Mechanics:931.1

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
2.Shenzhen Key Lab 3rd Generat Semicond Devices, Shenzhen 518055, Peoples R China

Zhang, Yulong,Luo, Anxin,Xu, Yixin,et al. Wideband MEMS Electrostatic Energy Harvester With Dual Resonant Structure[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2016:1-3.