Electret-based electrostatic energy harvesting device with the MEMS technology

Zhang, Yulong1; Luo, Anxin1; Xu, Yixin1; Wang, Tianyang1; Zhang, Ai1,2; Wang, Fei1,2

10.1109/MESA.2016.7587152

2016

978-1-5090-6191-4

2016 12TH IEEE/ASME INTERNATIONAL CONFERENCE ON MECHATRONIC AND EMBEDDED SYSTEMS AND APPLICATIONS (MESA)

1-6

29-31 Aug. 2016

Auckland, New zealand

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

In this paper, we propose an electrostatic energy harvester with an out-of-the-plane gap closing scheme. Using advanced MEMS technology, two components of the energy harvesting device are fabricated from two silicon wafers. A spray coated CYTOP polymer is used both as an electrets material and an adhesive layer for low temperature wafer bonding. The overall size of the device is about 13 x 18 mm(2). With an external load resistance of 16 M Omega, a power output of 4.04 mu W is achieved when vibration amplitude of 1g (similar to 9.9 m/s(2)) is applied at the resonant frequency of 155.8 Hz. The frequency response of the device is characterized and broader bandwidth is observed at higher acceleration amplitude due to the squeezed air damping. The response on random vibrations is also tested. An average power output of 2.22 mu W is harvested when vibration is applied at random frequency in a range of 160 +/- 12.5 Hz with RMS acceleration of 10.5 m/s(2).

Energy harvesting MEMS electret CYTOP random vibration

第一 ; 通讯

英语

CPCI-S ; EI

Shenzhen Science and Technology Innovation Commission[KQTD2015071710313656]

Automation & Control Systems ; Computer Science ; Engineering

Automation & Control Systems ; Computer Science, Artificial Intelligence ; Engineering, Electrical & Electronic

WOS:000387154700060

20164502997125

Electrets ; Electrostatic generators ; Electrostatics ; Embedded systems ; Frequency response ; MEMS ; Natural frequencies ; Silicon wafers ; Temperature ; Wafer bonding

Energy Conversion Issues:525.5 ; Thermodynamics:641.1 ; Electricity: Basic Concepts and Phenomena:701.1 ; Electric Equipment:704.2 ; Dielectric Materials:708.1 ; Semiconductor Devices and Integrated Circuits:714.2

Web of Science

1.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
2.Shenzhen Key Lab 3 Generat Semicond Devices, Shenzhen 518055, Peoples R China

Zhang, Yulong,Luo, Anxin,Xu, Yixin,et al. Electret-based electrostatic energy harvesting device with the MEMS technology[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2016:1-6.