Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide

Meng, Binbin1,2; Yuan, Dandan1; Zheng, Jian1; Xu, Shaolin1

2019-10

10.1016/j.mssp.2019.05.022

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING   影响因子和分区

1369-8001

1873-4081

To solve SiC machining processes problems such as low processing efficiency, surface/subsurface damage, and machining tool wear, a femtosecond-laser-aided machining process was studied. In this paper, the diamond-machinability and removal mechanism of SiC-modified layer during femtosecond-laser-aided machining process are evaluated at the nanoscale using molecular dynamics. The results show that micro/nano structures in the modified layer significantly influence the material removal process, and SiC surface structures effectively improve the removal efficiency and reduce subsurface damage depth. The surface micro/nano structures introduced by femtosecond laser scanning improve the diamond-machinability of mono-crystalline SiC.

SiC Femtosecond laser Surface modification Deformation

SCI ; EI

英语

第一 ; 通讯

National Natural Science Foundation of China[51705233]

Engineering ; Materials Science ; Physics

Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter

WOS:000472507900001

ELSEVIER SCI LTD

20192206991025

Carbide cutting tools ; Cutting tools ; Deformation ; Diamond cutting tools ; Efficiency ; Femtosecond lasers ; Machining ; Machining centers ; Molecular dynamics ; Silicon carbide ; Surface treatment

Machine Tools, General:603.1 ; Machine Tool Accessories:603.2 ; Machining Operations:604.2 ; Single Element Semiconducting Materials:712.1.1 ; Physical Chemistry:801.4 ; Inorganic Compounds:804.2 ; Production Engineering:913.1

MATERIALS SCIENCE

Web of Science

1.Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China
2.Wuhan Univ, Sch Power & Mech Engn, Wuhan 430000, Hubei, Peoples R China

Meng, Binbin,Yuan, Dandan,Zheng, Jian,et al. Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2019,101:1-9.

Meng, Binbin,Yuan, Dandan,Zheng, Jian,&Xu, Shaolin.(2019).Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,101,1-9.

Meng, Binbin,et al."Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 101(2019):1-9.