Scalable Synthesis of SnO2 Nanosheet Arrays on Chips for Ultralow Concentration NO2 Detection

Niu, Gaoqiang; Zhao, Changhui; Wang, Fei

10.1109/NEMS51815.2021.9451385

2021

16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)

2474-3747

2474-3755

978-1-6654-3008-1

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)

820-823

APR 25-29, 2021

null,Xiamen,PEOPLES R CHINA

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This work reports a chemiresistive type of NO2 sensor based on patterned SnO2 nanosheet arrays (NSAs), which are in-situ synthesized on MEMS chips via a scalable one-step homogeneous precipitation approach. Dry etching of SnO2 NSAs is studied by using an inductively couple plasma (ICP) process. As-grown SnO2 nanosheets demonstrate ultrathin thickness with cross-linked networks. The SnO2 NSAs based sensor exhibits ultrasensitive (150.9, at 10 ppm) to NO2 gas at 150 degrees C with a wide concentration range from 30 ppb to 50 ppm. Especially, this sensor also shows liner relationships between sensor response and NO2 concentration within the range of 30-1000 ppb and 2-50 ppm, respectively, indicating a promising route for detection of ultralow concentration of NO2. Our results provide a new strategy toward in-situ wafer-level fabrication of SnO2 NSAs based micro gas sensing devices.

Micromechanical devices Fabrication Nanoelectromechanical systems Dry etching Lithography Reproducibility of results Sensors

第一 ; 通讯

英语

CPCI-S ; EI

National Key Research and Development Program of China[2020YFB2008604]

Engineering ; Science & Technology - Other Topics ; Materials Science

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:000693407600095

20213410818097

Dry etching ; Nanosheets

Nanotechnology:761 ; Chemical Reactions:802.2 ; Solid State Physics:933

Web of Science

Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China

Niu, Gaoqiang,Zhao, Changhui,Wang, Fei. Scalable Synthesis of SnO2 Nanosheet Arrays on Chips for Ultralow Concentration NO2 Detection[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2021:820-823.