中文版 | English
题名

Application of a gateless AlGaN/GaN HEMT sensor for diesel soot particulate detection

作者
通讯作者Yu,Hongyu
发表日期
2021-12-15
DOI
发表期刊
ISSN
0925-4005
EISSN
0925-4005
卷号349
摘要

A particulate matter micro-sensor for automotive exhaust systems based on a gateless wide-bandgap AlGaN/GaN high electron mobility transistor was developed and tested. Soot particles were generated by a laminar diesel flame and characterized with Raman spectroscopy, thermogravimetric analysis and scanning electron microscopy. Particle adsorption at the rate of 0.25 µg/min on the sensor surface resulted in 5.52% sensing response after 20 s and large signal variation of 4.44 mA, indicating fast response time. Saturated response of 34.72% (27.94 mA) was obtained after 10 min of deposition. The sensitivity towards soot is attributed to the modulation of the two-dimensional electron gas density by charged particles on the sensing surface. After soot deposition, the sensor was successfully regenerated by thermal oxidation of the carbonaceous particles at 600 °C. The sensing response remained unchanged post-regeneration indicating high temperature stability and harsh environment operation compatibility of the demonstrated GaN-based sensor. Nevertheless, interconnect metal optimization is still required to mitigate high-temperature interdiffusion.

关键词
相关链接[Scopus记录]
收录类别
SCI ; EI
语种
英语
学校署名
第一 ; 通讯
资助项目
Key-Area Research and Development Program of Guangdong Province[
WOS研究方向
Chemistry ; Electrochemistry ; Instruments & Instrumentation
WOS类目
Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS记录号
WOS:000707306200002
出版者
EI入藏号
20214010974589
EI主题词
Aluminum gallium nitride ; Density of gases ; Deposition ; Diesel engines ; Dust ; High electron mobility transistors ; III-V semiconductors ; Particles (particulate matter) ; Scanning electron microscopy ; Soot ; Thermogravimetric analysis ; Thermooxidation
EI分类号
Air Pollution Sources:451.1 ; Diesel Engines:612.2 ; Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Chemistry:801 ; Chemical Reactions:802.2 ; Chemical Operations:802.3 ; Chemical Products Generally:804 ; Inorganic Compounds:804.2 ; Physical Properties of Gases, Liquids and Solids:931.2 ; Materials Science:951
ESI学科分类
CHEMISTRY
Scopus记录号
2-s2.0-85116012949
来源库
Scopus
引用统计
被引频次[WOS]:4
成果类型期刊论文
条目标识符http://sustech.caswiz.com/handle/2SGJ60CL/253437
专题工学院_深港微电子学院
工学院_材料科学与工程系
作者单位
1.School of Microelectronics,Southern University of Science and Technology,Shenzhen,518055,China
2.Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen,518055,China
3.GaN Device Engineering Technology Research Center of Guangdong,Southern University of Science and Technology,Shenzhen,518055,China
4.The Key Laboratory of the Third Generation Semi-conductor,Southern University of Science and Technology,Shenzhen,518055,China
5.Department of Materials Engineering,The University of British Columbia (UBC),Vancouver,V6T 1Z4,Canada
6.Department of Microelectronics,Delft University of Technology,2628 CD Delft,Netherlands
第一作者单位深港微电子学院;  南方科技大学
通讯作者单位深港微电子学院;  南方科技大学
第一作者的第一单位深港微电子学院
推荐引用方式
GB/T 7714
Sokolovskij,Robert,Zheng,Hongze,Li,Wenmao,et al. Application of a gateless AlGaN/GaN HEMT sensor for diesel soot particulate detection[J]. SENSORS AND ACTUATORS B-CHEMICAL,2021,349.
APA
Sokolovskij,Robert.,Zheng,Hongze.,Li,Wenmao.,Zhou,Guangnan.,Wang,Qing.,...&Yu,Hongyu.(2021).Application of a gateless AlGaN/GaN HEMT sensor for diesel soot particulate detection.SENSORS AND ACTUATORS B-CHEMICAL,349.
MLA
Sokolovskij,Robert,et al."Application of a gateless AlGaN/GaN HEMT sensor for diesel soot particulate detection".SENSORS AND ACTUATORS B-CHEMICAL 349(2021).
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