Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography

Li，Mingjie1; Luo，Wenxin1; Chen，Yulong1; Zheng，Yini2; Cheng，Xing1

2021-10-15

10.1016/j.mee.2021.111636

MICROELECTRONIC ENGINEERING   影响因子和分区

0167-9317

1873-5568

In this work, we develop a facile processing technique that tailors the microstructure of the void-free micro-pillars on a nickel substrate based on electroplating for applications in nanoimprint lithography (NIL). The obtained nickel pillars typically have an inhomogeneous microstructure consists of columnar grains and a multitude of nanocrystalline. The columnar grain size is refined when using alternating current, which is a result of the disrupted grain growth and promoted grain nucleation due to higher cathodic overpotential. The nickel micro-pillars produced by alternating current also yield a higher hardness of 3.5±0.2 GPa while maintaining a moderate plasticity index of 0.53±0.06. The enhanced mechanical strength of the micro-pillars through microstructure fine-tuning is potentially helpful for large-scale patterning by NIL for commercial manufacturing.

Electroplating Metallic mold Microstructure Nanoimprint Nanoindentation

EI ; SCI

英语

第一 ; 通讯

Engineering ; Science & Technology - Other Topics ; Optics ; Physics

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied

WOS:000710200000004

ELSEVIER

20214111001643

Electric impedance measurement ; Electroplating ; Molds ; Nanocrystals ; Nanoindentation ; Nickel

Electroplating:539.3.1 ; Nickel:548.1 ; Nanotechnology:761 ; Crystalline Solids:933.1 ; Electric Variables Measurements:942.2 ; Mechanical Variables Measurements:943.2 ; Materials Science:951

ENGINEERING

2-s2.0-85116594119

Scopus

1.Shenzhen Key Laboratory for Nanoimprint Technology,Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518055,China
2.Department of Materials Science and Engineering,City University of Hong Kong,999077,Hong Kong

Li，Mingjie,Luo，Wenxin,Chen，Yulong,et al. Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography[J]. MICROELECTRONIC ENGINEERING,2021,250.

Li，Mingjie,Luo，Wenxin,Chen，Yulong,Zheng，Yini,&Cheng，Xing.(2021).Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography.MICROELECTRONIC ENGINEERING,250.

Li，Mingjie,et al."Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography".MICROELECTRONIC ENGINEERING 250(2021).