Repulsive magnetic field-assisted laser-induced plasma micromachining for high-quality microfabrication

Tang, Hongwei; Qiu, Pei; Cao, Ruixing; Zhuang, Jianlin; Xu, Shaolin

2019-06

10.1007/s00170-019-03370-5

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY   影响因子和分区

0268-3768

1433-3015

Surface micro-/nanostructures are widely used in the fabrication of various functional microsystems. Laser-induced plasma micromachining can greatly improve surface quality in terms of recast layers and thermal defects compared with laser direct writing. Magnetic field has the ability to constrain plasma diffusion and can ensure the stability of laser-induced plasma processing. This paper compares the effects of laser direct-writing processing and laser-induced plasma processing of single-crystal silicon at the micro-/nanoscale, and emphatically analyzes the material removal mechanism of repulsive magnetic field-assisted laser-induced plasma micromachining. It is shown that the volume of the laser-induced plasma was constrained under the influence of Lorentz force, a high-quality smooth microgroove without thermal defects was obtained, and its line width was reduced by 30%.

Micro- nanofabrication Laser-induced plasma micromachining Magnetic confinement Thermal defects

SCI ; EI

英语

第一 ; 通讯

National Natural Science Foundation of China[51705233]

Automation & Control Systems ; Engineering

Automation & Control Systems ; Engineering, Manufacturing

WOS:000469002200084

SPRINGER LONDON LTD

20190506460187

Laser materials processing ; Magnetic field effects ; Magnetoplasma ; Micromachining ; Plasma devices ; Plasma stability ; Silicon wafers ; Single crystals

Machining Operations:604.2 ; Magnetism: Basic Concepts and Phenomena:701.2 ; Semiconductor Devices and Integrated Circuits:714.2 ; Laser Applications:744.9 ; Plasma Physics:932.3 ; Crystalline Solids:933.1

ENGINEERING

Web of Science

Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen, Peoples R China

Tang, Hongwei,Qiu, Pei,Cao, Ruixing,et al. Repulsive magnetic field-assisted laser-induced plasma micromachining for high-quality microfabrication[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2019,102(5-8):2223-2229.

Tang, Hongwei,Qiu, Pei,Cao, Ruixing,Zhuang, Jianlin,&Xu, Shaolin.(2019).Repulsive magnetic field-assisted laser-induced plasma micromachining for high-quality microfabrication.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,102(5-8),2223-2229.

Tang, Hongwei,et al."Repulsive magnetic field-assisted laser-induced plasma micromachining for high-quality microfabrication".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 102.5-8(2019):2223-2229.