Single-Crystalline Vanadium Dioxide Actuators

Shi, Run1,2,3; Cai, Xiangbin2,3; Wang, Weijun1; Wang, Jingwei1,2,3; Kong, Dejun1; Cai, Nianduo1; Chen, Pengcheng1; He, Pingge2,3; Wu, Zefei2,3; Amini, Abbas4; Wang, Ning2,3; Cheng, Chun1

2019-05-16

10.1002/adfm.201900527

ADVANCED FUNCTIONAL MATERIALS   影响因子和分区

1616-301X

1616-3028

Actuators that convert other forms of energy to mechanical energy have attracted extensive interest for their critical applications in microelectromechanical systems and miniature robotics. Recently, it is discovered that vanadium dioxide (VO2)-based microscale bimorph actuators demonstrate comprehensive superiority of actuation performances, taking the good of the giant theoretical power density (7 J cm(-3)) and ultrafast response (approximate to picosecond) of crystalline VO2, while they still suffer from the intrinsic shortcomings of complex structures. Here, single-crystalline VO2 actuators (SCVAs) that have unique self-bending behavior upon temperature change are reported. This is realized by facilely and precisely controlling the phase structures via lateral stoichiometry-engineering in VO2 nanobeams at the nanoscale level. These SCVAs exhibit remarkable actuation performances and admirable stability, which are equivalent or even superior to the reported VO2-based conventional bimorph actuators. It is noteworthy that the gradual, reversible, and predictable bending of SCVAs enables a precise actuation control of related mechanics, such as the quantitative wind detector and thermal micromechanical claw. This work demonstrates the possibility of this strategy to enable single crystalline actuators excellent performance by internally lateral and gradual strain-engineering.

domain modulation metal-insulator transitions stoichiometry engineering thermal actuators vanadium dioxides

SCI ; EI

英语

NI期刊

第一 ; 通讯

Hong Kong Research Grants Council[C6021-14E]

Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics

Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter

WOS:000471335500016

WILEY-V C H VERLAG GMBH

20191206666190

Crystalline materials ; Electromechanical devices ; Mechanical actuators ; MEMS ; Metal insulator boundaries ; Metal insulator transition ; Semiconductor insulator boundaries ; Stoichiometry ; Thermal Engineering

Electric Equipment:704.2 ; Semiconductor Devices and Integrated Circuits:714.2 ; Control Equipment:732.1 ; Physical Chemistry:801.4 ; Crystalline Solids:933.1

MATERIALS SCIENCE

Web of Science

1.Southern Univ Sci & Technol, Dept Mat Sci & Engn, 1088 Xueyuan Blvd, Shenzhen 518055, Peoples R China
2.Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Clear Water Bay, Hong Kong, Peoples R China
3.Hong Kong Univ Sci & Technol, Ctr Quantum Mat, Kowloon, Clear Water Bay, Hong Kong, Peoples R China
4.Western Sydney Univ, Ctr Infrastruct Engn, Kingswood, NSW 2751, Australia

Shi, Run,Cai, Xiangbin,Wang, Weijun,et al. Single-Crystalline Vanadium Dioxide Actuators[J]. ADVANCED FUNCTIONAL MATERIALS,2019,29(20).

Shi, Run.,Cai, Xiangbin.,Wang, Weijun.,Wang, Jingwei.,Kong, Dejun.,...&Cheng, Chun.(2019).Single-Crystalline Vanadium Dioxide Actuators.ADVANCED FUNCTIONAL MATERIALS,29(20).

Shi, Run,et al."Single-Crystalline Vanadium Dioxide Actuators".ADVANCED FUNCTIONAL MATERIALS 29.20(2019).