A wafer-scale van der Waals dielectric made from an inorganic molecular crystal film

Liu，Kailang1; Jin，Bao1; Han，Wei1; Chen，Xiang2; Gong，Penglai3,4; Huang，Li3; Zhao，Yinghe1; Li，Liang5; Yang，Sanjun1; Hu，Xiaozong6; Duan，Junyuan1; Liu，Lixin1; Wang，Fakun1; Zhuge，Fuwei1; Zhai，Tianyou1

2021-12-01

10.1038/s41928-021-00683-w

Nature Electronics   影响因子和分区

2520-1131

Van der Waals dielectrics, such as hexagonal boron nitride, are widely used to preserve the intrinsic properties of two-dimensional semiconductors in electronic devices. However, fabricating these materials on the wafer scale and integrating them with two-dimensional semiconductors is challenging because their synthesis typically requires mechanical exfoliation or vapour deposition processes. Here we show that a high-κ van der Waals dielectric can be created on wafer scales using an inorganic molecular crystal film of antimony trioxide (SbO) fabricated via thermal evaporation deposition. Monolayer molybdenum disulfide (MoS) field-effect transistors supported by this dielectric substrate exhibit enhanced electron mobility—from 26 cm V s to 145 cm V s—and reduced transfer-curve hysteresis compared with when using SiO substrate. MoS transistors directly gated by the SbO film can operate with a supply voltage of 0.8 V, on/off ratio of 10 and subthreshold swing of 64 mV dec at 300 K.

SCI ; EI

英语

其他

WOS:000732547100016

20215211377014

Antimony compounds ; Field effect transistors ; Gate dielectrics ; III-V semiconductors ; Layered semiconductors ; Low-k dielectric ; Molecular crystals ; Molybdenum compounds ; Silica ; Silicon wafers ; Substrates ; Sulfur compounds ; Thermal evaporation

Dielectric Materials:708.1 ; Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Physical Chemistry:801.4 ; Atomic and Molecular Physics:931.3 ; Crystalline Solids:933.1

2-s2.0-85121491984

Scopus

1.State Key Laboratory of Materials Processing and Die and Mould Technology,School of Materials Science and Engineering,Huazhong University of Science and Technology,Wuhan,China
2.Nano and Heterogeneous Materials Center,School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing,China
3.Department of Physics,Southern University of Science and Technology,Shenzhen,China
4.Key Laboratory of Optic-Electronic Information and Materials of Hebei Province,Institute of Life Science and Green Development,College of Physics Science and Technology,Hebei University,Baoding,China
5.Institutes of Physical Science and Information Technology,Anhui University,Hefei,China
6.Green Catalysis Center,College of Chemistry,Zhengzhou University,Zhengzhou,China

Liu，Kailang,Jin，Bao,Han，Wei,et al. A wafer-scale van der Waals dielectric made from an inorganic molecular crystal film[J]. Nature Electronics,2021,4(12):906-913.

Liu，Kailang.,Jin，Bao.,Han，Wei.,Chen，Xiang.,Gong，Penglai.,...&Zhai，Tianyou.(2021).A wafer-scale van der Waals dielectric made from an inorganic molecular crystal film.Nature Electronics,4(12),906-913.

Liu，Kailang,et al."A wafer-scale van der Waals dielectric made from an inorganic molecular crystal film".Nature Electronics 4.12(2021):906-913.