Chip-scale optical airflow sensor

Luo, Yumeng1; An, Xiaoshuai1; Chen, Liang1; Li, Kwai Hei1,2,3

2022-01-04

10.1038/s41378-021-00335-1

Microsystems & Nanoengineering   影响因子和分区

2055-7434

2055-7434

Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip photodetector. Without the use of external components for light coupling, the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms(-1) and exhibits a fast response time of 12 ms, holding great promise for diverse practical applications. The potential use in monitoring human breathing is also demonstrated.

SCI ; EI

英语

第一 ; 通讯

National Natural Science Foundation of China[62004088,12074170] ; Shenzhen Natural Science Foundation Stability Support Program Project[20200925160044004] ; NSQKJJ[K21799120]

Science & Technology - Other Topics ; Instruments & Instrumentation

Nanoscience & Nanotechnology ; Instruments & Instrumentation

WOS:000737934900001

SPRINGERNATURE

20220211435536

III-V semiconductors ; Microchannels ; Photodetectors ; Woolen and worsted fabrics

Semiconducting Materials:712.1 ; Natural Fibers:819.1 ; Textile Products and Processing:819.5

2-s2.0-85122335261

Web of Science

1.Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
2.Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Com, Minist Educ, Shenzhen 518055, Peoples R China
3.Southern Univ Sci & Technol, Engn Res Ctr Three Dimens Integrat Guangdong Prov, Shenzhen 518055, Peoples R China

Luo, Yumeng,An, Xiaoshuai,Chen, Liang,et al. Chip-scale optical airflow sensor[J]. Microsystems & Nanoengineering,2022,8(1).

Luo, Yumeng,An, Xiaoshuai,Chen, Liang,&Li, Kwai Hei.(2022).Chip-scale optical airflow sensor.Microsystems & Nanoengineering,8(1).

Luo, Yumeng,et al."Chip-scale optical airflow sensor".Microsystems & Nanoengineering 8.1(2022).