Machinability improvement of silicon carbide via femtosecond laser surface modification method

Meng, Binbin1,2; Zheng, Jian1; Yuan, Dandan1; Xu, Shaolin1

2019-01

10.1007/s00339-018-2377-8

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING   影响因子和分区

0947-8396

1432-0630

In this paper, the laser-induced periodic surface structures (LIPSS) of single-crystal SiC and the machining properties of the modified layer are studied. The distribution of surface features as a function of laser repetition frequency and the phase of micro/nanostructures of the surface modification layer are investigated. Furthermore, wear and machinability of the modified SiC layer are analyzed using nano-scratching. The results indicate that surface modification with the femtosecond laser can effectively reduce the pushing and extrusion of material as well as facilitate removal of materials. The hybrid-grinding method can also reduce the influence of the size effect during processing, which effectively improves machinability of SiC during ultra-precision grinding process.

SCI ; EI

英语

第一 ; 通讯

Natural Science Foundation of Guangdong Province[2018A030310125]

Materials Science ; Physics

Materials Science, Multidisciplinary ; Physics, Applied

WOS:000454877700009

SPRINGER HEIDELBERG

20190206367063

Femtosecond lasers ; Grinding (machining) ; Grinding mills ; Silicon carbide ; Single crystals

Machining Operations:604.2 ; Inorganic Compounds:804.2 ; Crystalline Solids:933.1

PHYSICS

Web of Science

1.Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China
2.Wuhan Univ, Sch Power & Mech Engn, Wuhan 430000, Hubei, Peoples R China

Meng, Binbin,Zheng, Jian,Yuan, Dandan,et al. Machinability improvement of silicon carbide via femtosecond laser surface modification method[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2019,125(1).

Meng, Binbin,Zheng, Jian,Yuan, Dandan,&Xu, Shaolin.(2019).Machinability improvement of silicon carbide via femtosecond laser surface modification method.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,125(1).

Meng, Binbin,et al."Machinability improvement of silicon carbide via femtosecond laser surface modification method".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 125.1(2019).