Impact of crystalline structures on the thermal stability and Schottky barrier height of NiGe/Ge contact

Deng, Yunsheng1,2,3; He, Dongsheng2,3; Qiu, Yang2,3; Gu, Rui2,3; He, Jiaqing2,3; Nakatsuka, Osamu1

2018-12-17

10.1063/1.5078558

APPLIED PHYSICS LETTERS   影响因子和分区

0003-6951

1077-3118

We have investigated the effect of crystalline structures on the thermal stability and electrical properties of nickel monogermanide (NiGe)/Ge contacts. The crystalline structure of the NiGe layer was found to be a determining factor for the thermal stability. Compared with the polycrystalline NiGe layer, the epitaxial NiGe layer with the orientation NiGe(100) parallel to Ge(110) exhibited a promising thermal stability due to its uniform interface and small residual stress. We have also demonstrated the alleviation of Fermi level pinning (FLP) by controlling the crystalline structures of NiGe layers on Ge(110) substrates. These works give us a hint that controlling the crystalline structure of metal layers enables one to control the Schottky barrier height of metal/Ge contacts, and the origin of FLP is not due to the intrinsic factor, e.g., metal induced gap states, but due to the extrinsic factors such as strong anisotropy of the work function and disorders at the metal/Ge interfaces. Published by AIP Publishing.

SCI ; EI

英语

NI期刊

通讯

Shenzhen Peacock Plan team[KQTD2016022619565991]

Physics

Physics, Applied

WOS:000454216900025

AMER INST PHYSICS

20190106334438

Crystalline materials ; Germanium compounds ; Interface states ; Metals ; Schottky barrier diodes ; Semiconductor metal boundaries ; Stability ; Thermodynamic stability

Thermodynamics:641.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Classical Physics; Quantum Theory; Relativity:931 ; High Energy Physics; Nuclear Physics; Plasma Physics:932 ; Crystalline Solids:933.1

PHYSICS

Web of Science

1.Nagoya Univ, Grad Sch Engn, Dept Mat Phys, Nagoya, Aichi 4648603, Japan
2.Southern Univ Sci & Technol, Mat Characterizat & Preparat Ctr, Shenzhen 518055, Peoples R China
3.Southern Univ Sci & Technol, Dept Phys, Shenzhen 518055, Peoples R China

Deng, Yunsheng,He, Dongsheng,Qiu, Yang,et al. Impact of crystalline structures on the thermal stability and Schottky barrier height of NiGe/Ge contact[J]. APPLIED PHYSICS LETTERS,2018,113(25).

Deng, Yunsheng,He, Dongsheng,Qiu, Yang,Gu, Rui,He, Jiaqing,&Nakatsuka, Osamu.(2018).Impact of crystalline structures on the thermal stability and Schottky barrier height of NiGe/Ge contact.APPLIED PHYSICS LETTERS,113(25).

Deng, Yunsheng,et al."Impact of crystalline structures on the thermal stability and Schottky barrier height of NiGe/Ge contact".APPLIED PHYSICS LETTERS 113.25(2018).