Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography

Li，Mingjie1; Luo，Wenxin1; Xu，Jingfu1; Zhang，Juan2; Ng，Kar Wei3; Cheng，Xing1

2022-02-15

10.1016/j.mee.2022.111722

MICROELECTRONIC ENGINEERING   影响因子和分区

0167-9317

1873-5568

As nanoimprint lithography provides promising potential in industrial manufacture, it is highly desirable to fabricate a flexible mold with good surface hardness and corrosion resistance. In this work, a nano-patterned template with amorphous surface was fabricated by magnetron sputtering and electrodeposition. The glassy structure imparted high affinity to oxygen with selective oxidation of Zr, Cu, and Al atoms in ambient atmosphere. These nanoimprint templates, having excellent flexibility, surface hardness, and environmental stability, combined with strong capability for constructing nanopatterns, are advantageous for high-resolution imprint lithography with good industrialization prospects.

Electrodeposition Imprint lithography Oxidation Sputtering

SCI ; EI

英语

第一 ; 通讯

Department of Science and Technology of Guangdong Province[2020B0101030001] ; Shenzhen Science and Technology Innovation Committee[ZDSYS20140509142721431] ; Research Services and Knowledge Transfer Office at the University of Macau[MYRG2018-00086-IAPME]

Engineering ; Science & Technology - Other Topics ; Optics ; Physics

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied

WOS:000787886200001

ELSEVIER

20220411515627

Amorphous alloys ; Corrosion resistance ; Electrodeposition ; Electrodes ; Fabrication ; Hardness ; Nanoimprint lithography ; Zircaloy

Metallurgy and Metallography:531 ; Metals Corrosion:539.1 ; Electroplating:539.3.1 ; Reproduction, Copying:745.2 ; Nanotechnology:761 ; Chemical Reactions:802.2 ; Solid State Physics:933 ; Materials Science:951

ENGINEERING

2-s2.0-85123248412

Scopus

1.Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518055,China
2.Department of Environmental Science and Engineering,Southern University of Science and Technology,Shenzhen,518055,China
3.Institute of Applied Physics and Materials Engineering,University of Macau,Taipa,China

Li，Mingjie,Luo，Wenxin,Xu，Jingfu,et al. Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography[J]. MICROELECTRONIC ENGINEERING,2022,256.

Li，Mingjie,Luo，Wenxin,Xu，Jingfu,Zhang，Juan,Ng，Kar Wei,&Cheng，Xing.(2022).Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography.MICROELECTRONIC ENGINEERING,256.

Li，Mingjie,et al."Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography".MICROELECTRONIC ENGINEERING 256(2022).