| 题名 | Volume-expansion polymerization for UV-curable nanoimprinting |
| 作者 | |
| 通讯作者 | Cheng, Xing |
| 发表日期 | 2017
|
| DOI | |
| 发表期刊 | |
| ISSN | 1071-1023
|
| 卷号 | 35期号:1 |
| 摘要 | In ultraviolet (UV) nanoimprinting, polymerization of liquid monomers is generally accompanied by a decrease in the resist volume, which often causes problems such as residual stress, pattern distortion, and replication defects. Thus, it is highly desirable to reduce or even eliminate volume shrinkage during monomer polymerization in UV nanoimprinting. To achieve this goal, monomers that undergo volume expansion during polymerization are added into the resist formulation. Spiro-orthocarbonate is a monomer that expands upon cationic ring-opening polymerization. By mixing the spiro-orthocarbonate monomer with a common epoxy monomer, the authors achieved a zero volume change after curing. It is also possible to achieve volume expansion in this new resist formulation. The residual stress in the cured resist structures is also effectively mitigated. It is expected that elimination of volume shrinkage in UV nanoimprinting can address important issues such as pattern fidelity and high demolding forces. (C) 2017 American Vacuum Society. |
| 相关链接 | [来源记录] |
| 收录类别 | |
| 语种 | 英语
|
| 学校署名 | 通讯
|
| 资助项目 | Shenzhen Science and Technology Innovation Committee for basic science[JCYJ20140417105742711]
|
| WOS研究方向 | Engineering
; Science & Technology - Other Topics
; Physics
|
| WOS类目 | Engineering, Electrical & Electronic
; Nanoscience & Nanotechnology
; Physics, Applied
|
| WOS记录号 | WOS:000395468500035
|
| 出版者 | |
| EI入藏号 | 20170203238661
|
| EI主题词 | Cationic polymerization
; Curing
; Expansion
; Monomers
; Nanoimprint lithography
; Residual stresses
; Shrinkage
|
| EI分类号 | Nanotechnology:761
; Chemical Reactions:802.2
; Chemical Products Generally:804
; Polymerization:815.2
; Solid State Physics:933
; Materials Science:951
|
| ESI学科分类 | MATERIALS SCIENCE
|
| 来源库 | Web of Science
|
| 引用统计 |
被引频次[WOS]：7
|
| 成果类型 | 期刊论文 |
| 条目标识符 | http://sustech.caswiz.com/handle/2SGJ60CL/29222 |
| 专题 | 工学院_材料科学与工程系 |
| 作者单位 | 1.Texas A&M Univ, Dept Elect & Comp Engn, College Stn, TX 77843 USA 2.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen Key Lab Nanoimprint Technol, 1088 Xueyuan Blvd, Shenzhen 518055, Guangdong, Peoples R China |
| 通讯作者单位 | 材料科学与工程系 |
| 推荐引用方式 GB/T 7714 |
Luo, Bingqing,Fan, Zengju,Li, Ziping,et al. Volume-expansion polymerization for UV-curable nanoimprinting[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2017,35(1).
|
| APA |
Luo, Bingqing,Fan, Zengju,Li, Ziping,Chen, Yulong,Tian, Yanqing,&Cheng, Xing.(2017).Volume-expansion polymerization for UV-curable nanoimprinting.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,35(1).
|
| MLA |
Luo, Bingqing,et al."Volume-expansion polymerization for UV-curable nanoimprinting".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 35.1(2017).
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| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | 操作 | |
| Luo-2017-Volume-expa（1301KB） | -- | -- | 限制开放 | -- | ||
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