A very dark-and-conductive electrode based on Mo/MoOx/ITO structure

Feng, Yuanxiang; Chen, Shuming

2016-10-30

10.1016/j.apsusc.2016.05.49

APPLIED SURFACE SCIENCE   影响因子和分区

0169-4332

1873-5584

A dark and conductive electrode based on Mo/MoOx/ITO structure with low resistivity of 1.93 x 10(-4) Omega/cm was fabricated by magnetron sputtering. The demonstrated dark electrode exhibits a low reflectance of 2.4-12.9% within the visible spectral range and average luminous reflectance of 3.3%. To improve the conductivity, pure Mo was first sputtered, followed by depositing a dark and conductive Mo0 by introducing 02 flow during Mo sputtering. In order to further reduce the reflectance and set the lowest reflectance at the wavelength of 550 nm, which is most sensitive to human eyes, an ITO phase changing layer was introduced on top of the MoOx. The demonstrated dark and conductive electrode can serve as bottom contact and can potentially replace the circular polarizer for high contrast top-emitting organic light-emitting diodes. (C) 2016 Elsevier B.V. All rights reserved.

Dark metal MoOx Low reflectance High conductivity Thin film interference

SCI ; EI

英语

第一 ; 通讯

Guangdong Natural Science Fund for Distinguished Young Scholar[2016A030306017]

Chemistry ; Materials Science ; Physics

Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter

WOS:000378560900043

ELSEVIER

20162302463595

Molybdenum ; Molybdenum oxide ; Organic light emitting diodes (OLED) ; Reflection

Molybdenum and Alloys:543.3 ; Semiconductor Devices and Integrated Circuits:714.2 ; Chemical Products Generally:804

MATERIALS SCIENCE

Web of Science

Southern Univ Sci & Technol, Shenzhen Key Lab Generat Semicond Devices 3, Dept Elect & Elect Engn, Shenzhen 518055, Guangdong, Peoples R China

Feng, Yuanxiang,Chen, Shuming. A very dark-and-conductive electrode based on Mo/MoOx/ITO structure[J]. APPLIED SURFACE SCIENCE,2016,384:348-352.

Feng, Yuanxiang,&Chen, Shuming.(2016).A very dark-and-conductive electrode based on Mo/MoOx/ITO structure.APPLIED SURFACE SCIENCE,384,348-352.

Feng, Yuanxiang,et al."A very dark-and-conductive electrode based on Mo/MoOx/ITO structure".APPLIED SURFACE SCIENCE 384(2016):348-352.