| 题名 | Enhanced interference using microcavity structure for accurate thin film thickness measurement |
| 作者 | |
| 通讯作者 | Chen, Shuming |
| 发表日期 | 2015-12
|
| DOI | |
| 发表期刊 | |
| ISSN | 1862-6300
|
| EISSN | 1862-6319
|
| 卷号 | 212期号:12页码:2718-2721 |
| 摘要 | A new method based on microcavity structure is developed for accurately measuring the thickness of organic thin films. By sandwiching the thin films between a bottom reflective mirror and a top semi-reflective mirror, the interference effect is greatly enhanced. As a result, the reflectance spectra exhibit distinctive, strong, and sharp interference peaks. The interference pattern is very sensitive to the thickness of the thin films. By fitting the interference pattern with the calculated reflectance spectra, the thickness of the thin films can be accurately determined. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |
| 关键词 | |
| 相关链接 | [来源记录] |
| 收录类别 | |
| 语种 | 英语
|
| 学校署名 | 第一
; 通讯
|
| 资助项目 | Special Support Program of Guangdong Province[2014TQ01X015]
|
| WOS研究方向 | Materials Science
; Physics
|
| WOS类目 | Materials Science, Multidisciplinary
; Physics, Applied
; Physics, Condensed Matter
|
| WOS记录号 | WOS:000366589900010
|
| 出版者 | |
| EI入藏号 | 20153601238739
|
| EI主题词 | Film Thickness
; Microcavities
; Mirrors
; Reflection
; Thickness Gages
; Thickness Measurement
|
| EI分类号 | Electronic Components And Tubes:714
; Optical Devices And Systems:741.3
; Mechanical Variables Measurements:943.2
; Special Purpose Instruments:943.3
|
| ESI学科分类 | PHYSICS
|
| 来源库 | Web of Science
|
| 引用统计 |
被引频次[WOS]：2
|
| 成果类型 | 期刊论文 |
| 条目标识符 | http://sustech.caswiz.com/handle/2SGJ60CL/29869 |
| 专题 | 工学院_电子与电气工程系 |
| 作者单位 | South Univ Sci & Technol China, Dept Elect & Elect Engn, Shenzhen 518055, Guangdong, Peoples R China |
| 第一作者单位 | 电子与电气工程系 |
| 通讯作者单位 | 电子与电气工程系 |
| 第一作者的第一单位 | 电子与电气工程系 |
| 推荐引用方式 GB/T 7714 |
Feng, Yuanxiang,Chen, Shuming. Enhanced interference using microcavity structure for accurate thin film thickness measurement[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,2015,212(12):2718-2721.
|
| APA |
Feng, Yuanxiang,&Chen, Shuming.(2015).Enhanced interference using microcavity structure for accurate thin film thickness measurement.PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,212(12),2718-2721.
|
| MLA |
Feng, Yuanxiang,et al."Enhanced interference using microcavity structure for accurate thin film thickness measurement".PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 212.12(2015):2718-2721.
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| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | 操作 | |
| pssa.201532319.pdf（483KB） | -- | -- | 限制开放 | -- | ||
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