Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate

Hong, L.1,2; Rusli1; Wang, X. C.2; Zheng, H. Y.2; Wang, H.1; Yu, H. Y.3

2014-04

10.1016/j.apsusc.2014.01.100

APPLIED SURFACE SCIENCE   影响因子和分区

0169-4332

1873-5584

In this paper, we report the fabrication of a large area uniformly distributed periodic nano-ripple structure on silicon substrate through the proper scanning of a line-shaped femtosecond laser beam. The fabricated nano-ripple structure has a periodicity of similar to 600 nm and a ripple depth of similar to 300 nm. The modulation depth is much deeper than the one previously reported. The developed structure is demonstrated to be able to substantially reduce light reflection due to the effective optical coupling between the incident sunlight with the nano-ripple structure and exhibit an absorption enhancement of similar to 41% compared with planar silicon wafer. The physics underlying the formation of the nano-ripple structure is also discussed. (C) 2014 Elsevier B.V. All rights reserved.

Femtosecond pulsed laser Ripple formation Si Laser fluence Optical reflection

SCI ; EI

英语

其他

Chemistry ; Materials Science ; Physics

Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter

WOS:000331717200020

ELSEVIER SCIENCE BV

20141017422861

Fabrication ; Femtosecond lasers ; Laser beams ; Light reflection ; Silicon ; Silicon wafers ; Substrates

Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Semiconductor Devices and Integrated Circuits:714.2 ; Light/Optics:741.1 ; Lasers, General:744.1 ; Laser Beam Interactions:744.8

MATERIALS SCIENCE

Web of Science

1.Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
2.Singapore Inst Mfg Technol, Singapore 638075, Singapore
3.South Univ Sci & Technol China, Shenzhen, Peoples R China

Hong, L.,Rusli,Wang, X. C.,et al. Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate[J]. APPLIED SURFACE SCIENCE,2014,297:134-138.

Hong, L.,Rusli,Wang, X. C.,Zheng, H. Y.,Wang, H.,&Yu, H. Y..(2014).Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate.APPLIED SURFACE SCIENCE,297,134-138.

Hong, L.,et al."Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate".APPLIED SURFACE SCIENCE 297(2014):134-138.