Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition

Wang，Junjie1,2; Zhang，Huan1; Zhao，Yunxing1; Yao，Lingze1,2; Zhao，Min1,2; Xu，Xiaoliang3; Yan，Baojie1; Ye，Jichun1; Zhao，Yusheng4,5; Wu，Sudong4,5

2021-07-01

10.1016/j.cartre.2021.100069

Carbon Trends   影响因子和分区

2667-0569

The Vertically Oriented Graphene Nanosheets (VGNs) possesses many promising properties and attracts intense interests in various applications due to its unique nanoarchitecture and intrinsic properties of graphene. However, a scalable growth of VGNs film with high rate is still an open challenge that hampers both the scientific research and mass applications. Herein, we report for the first time a large area growth of VGNs film with high rate via a high-density and high-flux mesoplasma chemical vapor deposition by rotating the substrate. A uniform VGNs film on a large area with a high growth rate on the order of ten micrometer per minute has been obtained. A continues growth process of VGNs film with high rate is also predicted by sweeping the substrate, which gives a new route for the scalable growth of VGNs film with high rate for the future mass applications.

High rate Mesoplasma CVD Scalable growth Vertically oriented graphene nanosheets

EI

英语

其他

National Key Research and Development Program of China[2016YFB0700202];Guangdong Provincial Key Laboratory of Construction Foundation[2018B030322001];National Natural Science Foundation of China - State Grid Corporation Joint Fund for Smart Grid[51732005];National Natural Science Foundation of China[51872279];National Natural Science Foundation of China[52072005];

20224313011369

Film growth ; Graphene ; Growth rate ; Nanosheets

Nanotechnology:761 ; Chemical Reactions:802.2 ; Chemical Products Generally:804 ; Solid State Physics:933

2-s2.0-85123086536

Scopus

1.Ningbo Institute of Material Technology and Engineering,Chinese Academy of Sciences,Ningbo,315201,China
2.Nano Science and Technology Institute,University of Science and Technology of China,Suzhou,215123,China
3.Key Laboratory of Strongly-Coupled Quantum Matter Physics,Chinese Academy of Sciences,School of Physical Sciences,University of Science and Technology of China,Hefei,230026,China
4.Academy for Advanced Interdisciplinary Studies,Southern University of Science and Technology,Shenzhen,518055,China
5.Guangdong-Hong Kong-Macao Joint Laboratory for Photonic-Thermal-Electrical Energy Materials and Devices,Southern University of Science and Technology,Shenzhen,518055,China

Wang，Junjie,Zhang，Huan,Zhao，Yunxing,et al. Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition[J]. Carbon Trends,2021,4.

Wang，Junjie.,Zhang，Huan.,Zhao，Yunxing.,Yao，Lingze.,Zhao，Min.,...&Wu，Sudong.(2021).Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition.Carbon Trends,4.

Wang，Junjie,et al."Scalable growth of vertically oriented graphene nanosheets with high rate by a high-flux mesoplasma chemical vapor deposition".Carbon Trends 4(2021).