Plasma-induced atom migration manufacturing of fused silica

Li，Rulin1; Li，Yaguo2; Deng，Hui1

2022-07-01

10.1016/j.precisioneng.2022.04.005

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   影响因子和分区

0141-6359

1873-2372

In this study, we report an ultra-precision nonsubtractive surface polishing technique named plasma-induced atom migration manufacturing (PAMM). In PAMM, the molten layer of the fused silica surface can be formed owing to the energy transmitted by inductively coupled plasma (ICP) which has a high gas temperature and radical density. The smoothing of surface is attributed to the rearrangement of surface atoms or clusters driven by surface tension. Unlike conventional subtractive smoothing processes, PAMM removes no material and can achieve damage-free surface with high efficiency and low cost, which makes it a promising technique to obtain large optical components with excellent optical performance and long operation life. The static and scanning smoothing characteristics of PAMM were presented and the surface smoothing mechanism was discussed. By this method, an ultrasmooth surface with Sa roughness of 0.15 nm was achieved. Furthermore, the validity of PAMM of spherical surface polishing and damaged surface recovering of fused silica was experimentally verified.

Atom migration Atomic and close-to-atomic scale manufacturing Polishing Roughness

SCI ; EI

英语

第一 ; 通讯

National Natural Science Foundation of China[52005243];National Natural Science Foundation of China[52035009];Shenzhen Graduate School, Peking University[JCYJ20200109141003910];Shenzhen Graduate School, Peking University[JCYJ20210324120402007];Shenzhen Graduate School, Peking University[KQTD20170810110250357];

Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation

Engineering, Multidisciplinary ; Engineering, Manufacturing ; Nanoscience & Nanotechnology ; Instruments & Instrumentation

WOS:000792953700002

ELSEVIER SCIENCE INC

20221611976629

Atoms ; Density of gases ; Fused silica ; Inductively coupled plasma ; Surface roughness

Machining Operations:604.2 ; Glass:812.3 ; Physical Properties of Gases, Liquids and Solids:931.2 ; Atomic and Molecular Physics:931.3 ; Plasma Physics:932.3

ENGINEERING

2-s2.0-85128223806

Scopus

1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology (SUSTech),Shenzhen,No. 1088, Xueyuan Road, Guangdong,518055,China
2.Fine Optical Engineering Research Centre,Chengdu,610041,China

Li，Rulin,Li，Yaguo,Deng，Hui. Plasma-induced atom migration manufacturing of fused silica[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,2022,76:305-313.

Li，Rulin,Li，Yaguo,&Deng，Hui.(2022).Plasma-induced atom migration manufacturing of fused silica.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,76,305-313.

Li，Rulin,et al."Plasma-induced atom migration manufacturing of fused silica".PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 76(2022):305-313.