Laser-induced microjet-assisted ablation for high-quality microfabrication

Guo, Yang1,2; Qiu, Pei2; Xu, Shaolin2; Cheng, Gary J.3

2022-09-01

10.1088/2631-7990/ac6632

International Journal of Extreme Manufacturing   影响因子和分区

2631-8644

2631-7990

Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m s(-1) in its initial 500 mu m displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation (LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.

liquid-assisted laser ablation laser-induced microjet cavitation bubbles laser microfabrication

SCI ; EI

英语

通讯

Guangdong Provincial University Science and Technology Program[2020KTSCX119] ; Shenzhen Science and Technology Programs[20200925155508001,"GJHZ20190820151801786","JCYJ20210324115608024","KQTD20170810110250357"]

Engineering ; Materials Science

Engineering, Manufacturing ; Materials Science, Multidisciplinary

WOS:000786301900001

IOP Publishing Ltd

20221912098565

Cavitation ; Debris ; Energy efficiency ; High speed cameras ; Laser ablation ; Laser beams ; Light scattering ; Microanalysis ; Microfabrication ; Micromachining ; Phase interfaces

Energy Conservation:525.2 ; Machining Operations:604.2 ; Liquid Dynamics:631.1.1 ; Heat Transfer:641.2 ; Light/Optics:741.1 ; Photographic Equipment:742.2 ; Laser Beam Interactions:744.8 ; Physical Chemistry:801.4

Web of Science

1.Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
2.Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China
3.Purdue Univ, Sch Ind Engn, W Lafayette, IN 47906 USA

Guo, Yang,Qiu, Pei,Xu, Shaolin,et al. Laser-induced microjet-assisted ablation for high-quality microfabrication[J]. International Journal of Extreme Manufacturing,2022,4(3).

Guo, Yang,Qiu, Pei,Xu, Shaolin,&Cheng, Gary J..(2022).Laser-induced microjet-assisted ablation for high-quality microfabrication.International Journal of Extreme Manufacturing,4(3).

Guo, Yang,et al."Laser-induced microjet-assisted ablation for high-quality microfabrication".International Journal of Extreme Manufacturing 4.3(2022).