High-Temperature Flexible Transparent Heater for Rapid Thermal Annealing of Thin Films

Liang，Renhong1; Wang，Huizhong2; Zhan，Shu1; Ye，Mao3; Shu，Longlong1; Fei，Linfeng1; Wang，Danyang2; Zheng，Renkui1; Ke，Shanming1

2022-04-01

10.1103/PhysRevApplied.17.044049

Physical Review Applied   影响因子和分区

2331-7019

2331-7019

Rapid heating is highly sought-after for compositional control in the sintering-annealing process of materials containing volatile elements. Although several innovative approaches have been reported, suitable processes for the rapid annealing of thin films are still very rare. Herein, we develop a high-temperature rapid heating method for thin-film preparation through employing an indium tin oxide (ITO)/mica-based flexible transparent heater (FTH). The ITO/mica FTH shows an extremely fast thermal response (2 s), high saturation temperature (>830 °C), and high heating-cooling rates (>104 °C min-1). Thermodynamic analysis reveals that the excellent heating performance can be largely attributed to the high heat-transfer coefficient and the low thickness of the mica substrates. The remarkable potential of our ITO/mica FTH for practical use is unambiguously evident by the demonstration of water heating and rapid thermal annealing of ferroelectric oxide thin films.

SCI ; EI

英语

其他

National Natural Science Foundation of China[51972157,11964017] ; Natural Science Foundation of Jiangxi Province[20192ACB21017]

Physics

Physics, Applied

WOS:000796444000002

AMER PHYSICAL SOC

20221912073208

Ferroelectric films ; Ferroelectricity ; Film preparation ; Heating ; Mica ; Oxide films ; Rapid thermal annealing ; Sintering ; Temperature ; Thermoanalysis ; Thin films

Minerals:482.2 ; Heat Treatment Processes:537.1 ; Thermodynamics:641.1 ; Electricity: Basic Concepts and Phenomena:701.1 ; Dielectric Materials:708.1 ; Chemistry:801 ; Inorganic Compounds:804.2

2-s2.0-85129433175

Scopus

1.School of Materials Science and Engineering,Nanchang University,Nanchang,330031,China
2.School of Materials Science and Engineering,University of New South Wales,Sydney,2052,Australia
3.Department of Physics,South University of Science and Technology,Shenzhen,518060,China

Liang，Renhong,Wang，Huizhong,Zhan，Shu,et al. High-Temperature Flexible Transparent Heater for Rapid Thermal Annealing of Thin Films[J]. Physical Review Applied,2022,17(4).

Liang，Renhong.,Wang，Huizhong.,Zhan，Shu.,Ye，Mao.,Shu，Longlong.,...&Ke，Shanming.(2022).High-Temperature Flexible Transparent Heater for Rapid Thermal Annealing of Thin Films.Physical Review Applied,17(4).

Liang，Renhong,et al."High-Temperature Flexible Transparent Heater for Rapid Thermal Annealing of Thin Films".Physical Review Applied 17.4(2022).