南方科技大学知识苑(SUSTech KC): Self-Aligned Laser-Induced Periodic Surface Structures for Large-Area Controllable Nanopatterning

题名	Self-Aligned Laser-Induced Periodic Surface Structures for Large-Area Controllable Nanopatterning
作者	Huang, Jiaxu1 ; Xu, Kang1 ; Xu, Shaolin1 ; Li, Xiaowei 2; Wei, Qi-Huo 1
通讯作者	Xu, Shaolin
发表日期	2022-05-01
DOI	10.1002/lpor.202200093
发表期刊	Laser & Photonics Reviews 影响因子和分区
ISSN	1863-8880
EISSN	1863-8899
卷号	16
摘要	Laser-induced periodic surface structures (LIPSS) have become an important avenue towards surface nanopatterning and certain device applications due to their subwavelength feature size and versatility with different materials. However, the uncontrollable non-uniformity in achievable nanostructures presents a limit towards its practical application. Here, a robust approach is proposed to obtain controllable nanostructures with long-range order based on a new insight into one of the electromagnetic origins of nonuniformity of LIPSS, namely a half-periodic mismatched optical enhancement (h-MOE) effect. The h-MOE effect originates from the interference enhancement of surface plasmon polaritons (SPPs) located between tips of every two adjacent ripples in laser scanning process. It is found that LIPSS can be self-aligned and highly controllable if the h-MOE effect is elaborately modulated through designed laser scanning strategies especially sequential scanning paths. The new laser nanopatterning approach based on h-MOE demonstrates controllable patterning ability to theoretically infinitely large-area super-straight gratings, orientation-controllable gratings, and half-periodic mismatched nanohole arrays.
关键词	femtosecond lasers half-periodic mismatched optical enhancement laser-induced periodic surface structures (LIPSS) self-aligned nanopatterning surface plasmon polaritons (SPPs) interference
相关链接	[来源记录]
收录类别	SCI ; EI
语种	英语
学校署名	第一 ; 通讯
资助项目	Guangdong Provincial University Science and Technology Program[2020KTSCX119] ; Shenzhen Science and Technology Programs[20200925155508001,"GJHZ20190820151801786","KQTD20170810110250357"]
WOS研究方向	Optics ; Physics
WOS类目	Optics ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000797777400001
出版者	WILEY-V C H VERLAG GMBH
EI入藏号	20222112136784
EI主题词	Femtosecond lasers ; Laser applications ; Nanostructures ; Phonons ; Photons ; Scanning ; Surface analysis ; Surface plasmon resonance ; Surface structure
EI分类号	Electromagnetic Waves:711 ; Lasers, General:744.1 ; Laser Applications:744.9 ; Nanotechnology:761 ; Physical Properties of Gases, Liquids and Solids:931.2 ; Atomic and Molecular Physics:931.3 ; Solid State Physics:933 ; Materials Science:951
来源库	Web of Science
引用统计	被引频次[WOS]：31
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/334994
专题	工学院_机械与能源工程系
作者单位	1.Southern Univ Sci & Technol, Dept Mech & Energy Engn, 1088 Xueyuan Ave, Shenzhen 518055, Peoples R China 2.Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, 5 South St Zhongguancun, Beijing 100081, Peoples R China
第一作者单位	机械与能源工程系
通讯作者单位	机械与能源工程系
第一作者的第一单位	机械与能源工程系
推荐引用方式 GB/T 7714	Huang, Jiaxu,Xu, Kang,Xu, Shaolin,et al. Self-Aligned Laser-Induced Periodic Surface Structures for Large-Area Controllable Nanopatterning[J]. Laser & Photonics Reviews,2022,16.
APA	Huang, Jiaxu,Xu, Kang,Xu, Shaolin,Li, Xiaowei,&Wei, Qi-Huo.(2022).Self-Aligned Laser-Induced Periodic Surface Structures for Large-Area Controllable Nanopatterning.Laser & Photonics Reviews,16.
MLA	Huang, Jiaxu,et al."Self-Aligned Laser-Induced Periodic Surface Structures for Large-Area Controllable Nanopatterning".Laser & Photonics Reviews 16(2022).