闪耀光栅及其制备方法和应用

段天利; 张锐; 王尧; 徐康; 马续航; 瞿学选

段天利

南方科技大学

南方科技大学

518055 广东省深圳市南山区西丽镇学苑大道1088号南方科技大学

南方科技大学

518055 广东省深圳市南山区西丽镇学苑大道1088号南方科技大学 (广东,深圳,南山区)

南方科技大学

518055 广东省深圳市南山区西丽镇学苑大道1088号南方科技大学 (广东,深圳,南山区)

CN201910857437.X

2019-09-10

CN110596801B

2020-11-10

2020-11-10

未缴年费

2022-08-19

授权发明

第一

本发明涉及一种闪耀光栅及其制备方法和应用。上述闪耀光栅的制备方法包括如下步骤：采用第一抗蚀剂在衬底上形成第一抗蚀层；将第一抗蚀层进行曝光和显影，形成具有图案的第一抗蚀层；在衬底上形成金属层，金属层遮盖第一抗蚀层；去除第一抗蚀层，得到具有多个间隔排列的金属条的金属层；在衬底上形成具有多个抗蚀条的第二抗蚀层，多个抗蚀条与多个金属条交替排列，且每个抗蚀条与相邻的一个金属条连接并构成一个图案单元，多个图案单元间隔排列；从衬底形成有第二抗蚀层的一侧对衬底进行离子刻蚀，以使第二抗蚀层被刻蚀，并使衬底上形成多个斜面；去除金属层，得到闪耀光栅。上述闪耀光栅的制备方法简单且能够得到纳米尺寸的闪耀光栅。

The invention relates to a blazed grating, and a preparation method and application thereof. The preparation method of the blazed grating comprises the following steps of forming a first resist layeron a substrate by using a first resist; performing exposure and development on the first resist layer to form the first resist layer with patterns; forming a metal layer on the substrate, wherein themetal layer covers the first resist layer; removing the first resist layer to obtain the metal layer with a plurality of metal strips arranged at intervals; forming a second resist layer with a plurality of resist strips on the substrate, wherein the plurality of resist strips and the plurality of metal strips are in alternating arrangement, each resist strip and the adjacent metal strip are connected and form a pattern unit, and a plurality of pattern units are arranged at intervals; performing ion etching on the substrate from one side, with the second resist layer, of the substrate so thatthe second resist layer is etched, and forming a plurality of inclined surfaces on the substrate; and removing the metal layer to obtain the blazed grating. The preparation method of the blazed grating is simple, and the nano-size blazed grating can be obtained.

G02B5/1857

G02B5/18

（+PATENT GRANT）[2020-11-10][CN]

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潘艳丽

广州华进联合专利商标代理有限公司

PatSnap

段天利,张锐,王尧,等. 闪耀光栅及其制备方法和应用[P]. 2020-11-10.