一种火花辅助化学刻蚀微结构的装置

本实用新型公开了一种火花辅助化学刻蚀微结构的装置，包括：电源系统，所述电源系统包括脉冲电源，所述脉冲电源能够输出脉冲直流电压，所述脉冲直流电压具有正向偏置，所述脉冲电源的正极连接阳极，所述脉冲电源的负极连接工具电极；工作液系统，所述工作液系统包括加工槽，所述加工槽用以盛装电解液，在工作状态时，所述阳极和所述工具电极均位于所述电解液中。本实用新型通过采用能够输出具有正向偏置的脉冲直流电压的脉冲电源，能够抑制工具电极的消耗，工件不需要接入电源，不受工件材料本身导电性能的影响，能够实现导电材料和非导电材料高效率、高精度、高表面质量加工。

The utility model discloses a device for spark-assisted chemical etching of a microstructure. The device comprises a power supply system, the power supply system comprises a pulse power supply, the pulse power supply can output pulse direct-current voltage, the pulse direct-current voltage has forward bias, a positive electrode of the pulse power supply is connected with an anode, and a negative electrode of the pulse power supply is connected with a tool electrode; the working solution system comprises a processing tank, the processing tank is used for containing electrolyte, and in the working state, the anode and the tool electrode are both located in the electrolyte. By adopting the pulse power supply capable of outputting the pulse direct-current voltage with forward bias, the consumption of a tool electrode can be inhibited, a workpiece does not need to be connected with a power supply and is not influenced by the conductivity of a workpiece material, and high-efficiency, high-precision and high-surface-quality processing of a conductive material and a non-conductive material can be realized.